Geometrical phase optical elements with space-variant subwavelenght gratings

ABSTRACT

A space variant polarization optical element for spatially manipulating polarizationdependent geometrical phases of an incident light beam. The element comprises a substrate with a plurality of zones of gratings with a continuously varying orientation. The orientation denoted by θ(x-y) is equal to half of a desired geometrical phase (DGP) modulus 2π. Each grating has a local period that is smaller than the wavelength of the incident light beam. In other embodiments of the present invention the substrate comprises a plurality of zones of gratings with a continuously varying orientation.

FIELD OF THE INVENTION

The present invention relates to optical elements. More particularly itrelates to geometrical phase optical elements with space-variantsubwavelength gratings and their uses thereof

BACKGROUND OF THE INVENTION

The Pancharatnam-Berry phase is a geometrical phase associated with thepolarization of light. When the polarization of a beam traverses aclosed loop on the Poincare sphere, the final state differs from theinitial state by a phase factor equal to half the area Ω, encompassed bythe loop on the sphere (see S. Pancharatnam, Proc. Ind. Acad. Sci. A 44,247 (1956), and M. V. Berry, Proc. Roy. Soc. (London) A 392, 45 (1984)).In a typical experiment, the polarization of a uniformly polarized beamis altered by a series of space-invariant (transversely homogenous)waveplates and polarizers, and the phase, which evolves in thetime-domain is measured by means of interference (see R. Simon, H. J.Kimble and E. C. G. Sudharshan, Phys. Rev. Lett. 61, 19 (1988), and P.G. Kwiat and R. Y. Chiao, Phys. Rev. Lett. 66, 588 (1991)).

Recently, a Pancharatnam-Berry phase in the space-domain was considered.Using space-variant (transversely inhomogeneous) metal stripesubwavelength gratings, we demonstrated conversion of circularpolarization into radial polarization (see Z. Bomzon, V. Kleiner and E.Hasman, Appl. Phys. Lett. 79, 1587 (2001)), and showed that theconversion was accompanied by a space-variant phase modification ofgeometrical origin that effected the propagation of the beams (Z.Bomzon, V. Kleiner, and E. Hasman, Opt. Lett. 26, 1424 (2001)).

Previously Bhandari suggested using a discontinuous spatially varyingwaveplate as a lens based on similar geometrical phase effects (R.Bhandari, Phys. Rep. 281, 1 (1997)). Recent studies have investigatedperiodic polarization gratings (F. Gori, Opt. Lett. 24, 584 (1999), C.R. Fernández-Pousa, I. Moreno, J. A. Davis and J. Adachi, Opt. Lett. 26,1651 (2001) and J. Tervo, and J. Turunen, Opt. Lett. 25, 785 (2000)).These authors showed that the polarization of the diffracted orderscould differ from the polarization of the incident beam. We intend toprove and utilize a connection between the properties of suchpolarization gratings and the space-domain Pancharatnam-Berry phase.

BRIEF DESCRIPTION OF THE INVENTION

There is thus provided, in accordance with some preferred embodiments ofthe present invention a space variant polarization optical element forspatially manipulating polarization-dependent geometrical phases of anincident light beam, the element comprising a substrate comprising aplurality of zones of gratings with a continuously varying orientation,the orientation denoted by θ(x, y) which is equal to half of a desiredgeometrical phase (DGP) modulus 2π, each grating with a local periodthat is smaller than the wavelength of the incident light beam.

Furthermore, in accordance with some preferred embodiments of thepresent invention, the orientation of the grating satisfies the equation2θ(x,y)=πr²/λf|_(mod2π), where f is a desired focal length and λ is thewavelength of the incident light beam, whereby the optical element isused as a converging lens if the incident light beam exhibits right-handcircular polarization, and as a diverging lens if the incident lightbeam exhibits left-hand circular polarization.

Furthermore, in accordance with some preferred embodiments of thepresent invention, the following relation is maintained ∇×K_(g)=0, where

K_(g)=K₀(x,y)[cos(φ_(d)(x,y)/2){circumflex over(x)}+sin(φ_(d)(x,y)/2)ŷ], where K_(g) is a grating vector, {circumflexover (x)} and ŷ are unit vectors in the x and y direction, K₀=2π/Λ(x,y),where K₀ is the spatial frequency of the grating, Λ is the local periodof the grating and φ_(d)(x,y)/2 is the space-variant direction of thevector so that it is perpendicular to the grating stripes at any givenpoint.

Furthermore, in accordance with some preferred embodiments of thepresent invention, the optical element is used as diffraction gratingelement, wherein the following equation is maintainedφ_(d)=(2π/d)x|_(mod2π), where d is the period of the plurality of zones,and wherein the grating satisfies the relation

φ_(g)(x,y)=(2d/Λ₀)sin(πx/d)exp(−πy/d), where Λ₀ is the local period ofthe grating at y=0.

Furthermore, in accordance with some preferred embodiments of thepresent invention, the substrate is a wafer.

Furthermore, in accordance with some preferred embodiments of thepresent invention, the wafer is manufactured using photolithographytechniques.

Furthermore, in accordance with some preferred embodiments of thepresent invention, the wafer is manufactured using etching.

Furthermore, in accordance with some preferred embodiments of thepresent invention, the grating is in blazed form, with opposite blazeddirections for incident left-hand circular polarization and forright-hand circular polarization, of the incident light beam.

Furthermore, in accordance with some preferred embodiments of thepresent invention, the orientation of the gratings varies linearly in apredetermined direction.

Furthermore, in accordance with some preferred embodiments of thepresent invention, the orientation of the grating of the zones satisfiesthe equation

θ(x)=−πx/d|_(modπ), where θ(x) is the orientation of a grating line at aposition x on an axis, and d is the period of the orientation of thegrating of the zones.

Furthermore, in accordance with some preferred embodiments of thepresent invention, the optical element is used as an optical switch.

Furthermore, in accordance with some preferred embodiments of thepresent invention, the optical element is used as a beam-splitter.

Furthermore, in accordance with some preferred embodiments of thepresent invention, the optical element is used as a Lee-type binarysubwavelength structure mask.

Furthermore, in accordance with some preferred embodiments of thepresent invention, the optical element is used for polarimetry.

Furthermore, in accordance with some preferred embodiments of thepresent invention, the grating in each zone comprise of at least tworegions of gratings arranged in different orientations.

Furthermore, in accordance with some preferred embodiments of thepresent invention, the following relation is satisfied, θ(x,y)=ω(x,y)+c,where x and y are coordinates of a specific position in an orthogonalset of axes, ω=arctan(y/x) is the azimuthal angle, and c is a constant.

Furthermore, in accordance with some preferred embodiments of thepresent invention, the orientation of the grating is spiral.

Furthermore, in accordance with some preferred embodiments of thepresent invention, the orientation of the grating satisfies the relationθ(r,ω)=lω/2, where l is a topological charge, and r, ω indicate aspecific angular position at radius r and angle ω.

Furthermore, in accordance with some preferred embodiments of thepresent invention, the grating satisfy the relation

φ_(g)(r,ω)=(2πr₀/Λ₀)(r₀ /r) ^(l/2−1)cos[(l//2−1)ω]/[l/2−1] for l≠2, and

φ_(g)(r,ω)=(2πr₀/Λ₀)ln(r/r₀) for l=2, where Λ₀ is the local period ofthe grating.

Furthermore, in accordance with some preferred embodiments of thepresent invention, there is provided a space variant polarizationoptical element for spatially manipulating polarization-dependentgeometrical phases of an incident light beam, the element comprising asubstrate comprising a plurality of zones of gratings with discretelyvarying orientation, the orientation denoted by θ(x,y) which is equal tohalf of a desired geometrical phase (DGP) modulus 2π, each grating witha local period that is substantially smaller than the wavelength of theincident light beam.

Furthermore, in accordance with some preferred embodiments of thepresent invention, the discretely varying orientation comprises rotatedorientation.

Furthermore, in accordance with some preferred embodiments of thepresent invention, the rotated orientation varies linearly.

Furthermore, in accordance with some preferred embodiments of thepresent invention, the optical element is used as diffraction gratingelement, wherein the following equation is maintainedφ_(d)=(2π/d)x|_(mod2π), where d is the period of the plurality of zones,and wherein the grating satisfies the relation

φ_(g)(x,y)=(2d /Λ₀)sin(πx/d)exp(−πy/d), where Λ₀ is the local period ofthe grating at y=0.

Furthermore, in accordance with some preferred embodiments of thepresent invention, the orientation of the grating of the zones satisfiesthe equation

φ(x)=−πx/d|_(modπ), where θ(x) is the orientation of a grating line at aposition x on an axis, and d is the period of the orientation of thegrating of the zones.

Furthermore, in accordance with some preferred embodiments of thepresent invention, the grating in each zone comprise of at least tworegions of gratings arranged in different orientations.

Furthermore, in accordance with some preferred embodiments of thepresent invention, the zones of gratings are arranged in an annularmanner.

Furthermore, in accordance with some preferred embodiments of thepresent invention, the zones of gratings are arranged in a coaxialmanner.

Furthermore, in accordance with some preferred embodiments of thepresent invention, there is provided a method for spatially manipulatingpolarization-dependent geometrical phases of an incident light beam, themethod comprising: providing a substrate comprising a plurality of zonesof gratings, with a continuously varying orientation, the orientationdenoted by θ(x, y) which is equal to half of a desired geometrical phase(DGP) modulus 2π, each grating having a local period that is smallerthan the wavelength of the incident light beam irradiating the incidentlight beam onto the substrate.

Furthermore, in accordance with some preferred embodiments of thepresent invention, there is provided a method for spatially manipulatingpolarization-dependent geometrical phases of an incident light beam, themethod comprising: providing a substrate comprising a plurality of zonesof gratings with discretely varying orientation, the orientation denotedby θ(x, y) that is equal to half of a desired geometrical phase (DGP)modulus 2π, each grating with a local period that is substantiallysmaller than the wavelength of the incident light beam; irradiating thelight beam on the substrate.

Other aspects of the invention will be appreciated and become clearafter reading the present specification and reviewing the accompanyingdrawings.

BRIEF DESCRIPTION OF THE DRAWINGS

In order to better understand the present invention, and appreciate itspractical applications, the following Figures are provided andreferenced hereafter. It should be noted that the Figures are given asexamples only and in no way limit the scope of the invention. Likecomponents are denoted by like reference numerals.

FIG. 1: Illustration of the principle of PBOEs by use of the Poincaresphere.

FIG. 2: The geometry of the space-variant subwavelength grating, as wellas the Diffractive Geometrical Phase, DGP, for incident |R

and |L

polarizations.

FIG. 3: Measurements of the transmitted far-field for the subwavelengthgrating PBOE, when the retardation is φ=π/2 and φ=π respectively, forincident (a) circular left, (b) circular right and (c) linearpolarizations.

FIG. 4: Illustration of polarization diffraction gratings fabricatedusing subwavelength quasi-periodic structures. The orientation of thesubwavelength grooves, θ(x), varies periodically in the x-direction,resulting in an element with effective birefringence, whose optical axes(marked by the dark and light arrows in the picture), rotateperiodically. The polarization diffraction grating has period d, whichis larger than the incident wavelength, λ, whereas the localsubwavelength period is Λ<λ. The local optical axes at each point areoriented parallel and perpendicular to the subwavelength grooves.

FIG. 5: A diagram describing the operation of polarization diffractiongratings. A beam with polarization |E_(m)

is incident on the polarization grating. The resulting beam comprisesthree polarization orders, EPO(E Polarizing Order), which maintains theoriginal polarization and does not undergo phase modification. The RPO(Right Polarizing Order) that is |R

polarized, and whose phase is modified by 2θ(x), and LPO (LeftPolarizing Order) that is |L

polarized, and whose phase is modified by −2θ(x). Since θ(x) isperiodic, the RPO and the LPO undergo diffraction, resulting in theappearance of discrete diffraction orders.

FIG. 6: (a) The magnified geometric representation of the continuousblazed polarization diffraction grating; (b) the resulting DGPs for RPOand LPO formed by this structure. (c) shows a magnified image of aregion on the subwavelength structure, demonstrating the localsubwavelength period Λ(x,y), the local subwavelength groove orientationθ(x,y), and the local subwavelength grating vector K_(g). (d) Scanningelectron microscope image of the GaAs dielectric structure.

FIG. 7: Images and experimental (dots) and calculated cross-section(solid curves) of the far-field of the beam transmitted through theblazed polarization diffraction gratings, when the incident beam has |L

polarization, when the incident beam has |R

polarization, and when the incident beam has linear polarization , |↑

.

FIG. 8: Measurements and predicted diffraction efficiencies in the1^(st), −1^(st) and 0 orders of the metal-stripe and dielectric blazedpolarization gratings for various incident polarizations. The differentincident polarization were achieved by rotating a quarter waveplate(QWP) in front of the linearly polarized light emitted from the CO₂laser. The graphs show the efficiencies as a function of the orientationof the QWP. The efficiencies are normalized relative to the totaltransmitted intensity for each grating.

FIG. 9: geometric representation of the subwavelength structure of thebinary polarization diffraction grtaing (middle), as well as the DGPthat results from this structure (top). The pictures (bottom) areScanning Electron Microscope images of the dielectric subwavelengthstructure.

FIG. 10: Measured intensity and polarization in the various diffractionorders of the binary polarization diffraction grating for incident (a)|L

polarization, (b) incident |R

polarization and (c) incident |↑

polarization, as well as the intensity transmitted through a combinationof the binary diffraction grating and a circular polarizer oriented totransmit |R

polarization for (d) incident |L

polarization (e) incident |R

polarization and (f) incident |↑

polarization. The intensities are normalized so that the maximumintensity in each graph is equal to 1.

FIG. 11: The far-field images and calculated and measured cross-sectionsof the beam transmitted through the circular symmetric polarization modeswitching, (a) when the incident polarization is |L

, as well as (b) the image and cross-sections of the transmitted |L

component, and (c) the image and cross sections of the transmitted |R

component. Also shown, (bottom), the geometry of the subwavelengthquasi-periodic structure as well as the spiral DGP caused by thiselement.

FIG. 12: (a) Illustration of the principle of PBOEs by use of thePoincare sphere; the insets display the different local orientations ofsubwavelength grooves; (b) illustrates the geometrical definition of thegrating vector.

FIG. 13: The geometry of the subwavelength gratings for differenttopological charges, as well as an image of typical grating profiletaken with a scanning-electron microscope.

FIG. 14: (a) The interferogram measurements of the spiral PBOEs; (b) thecorresponding spiral phases for different topological charges.

FIG. 15: Experimental far-field images as well as their calculated andmeasured cross sections for the helical beams with l=1−4

FIG. 16: Actual quantized phase F(φ_(d)) as a function of the desiredphase φ_(d), as well as the multilevel discrete binary local gratingorientation. Inset, a scanning electron microscope image of a region onthe subwavelength structure.

FIG. 17: The magnified geometry of the grating for N=4, as well as thepredicted geometrical quantized phase distribution. Also shown, themeasured (triangles) and predicted (dashed curve) diffraction efficiencyas a function of the number of discrete levels, N.

FIG. 18: Illustration of the magnified geometry of a multilevel-PBOEfocussing lens with N=4, as well as the predicted multilevel geometricalphase. Inset, the image of the focused spot size as well as the measured(dots), and theoretically calculated (solid curve) cross section.

FIG. 19: Schematic presentation of the near-field Fourier transformpolarimetry based on a quantized space-variant subwavelength dielectricgrating followed by a subwavelength metal stripes polarizer.

FIG. 20: (a) The magnified geometry of the quantized space-variantdielectric grating with a number of quantized levels N=4. (b) Thequantized rotation angle of the subwavelength grating as a function ofthe x coordinate; the inset illustrates the local groove orientation.(c) Scanning electron microscopy image of a region on the subwavelengthstructure (d) Scanning electron microscopy image of a cross section ofthe subwavelength grooves.

FIG. 21: The diffraction orders emerging from the QSG; zero order(dashed), first order for |R

and |L

polarized beams (solid), and higher order for |R

and |L

polarized beams (dash-dot).

FIG. 22: Measured (dotes) and predicted (solid curves) of the normalizedtransmitted intensity as a function of the x coordinate along the QSG,when the fast axis of the rotating QWP was at angles of (a) 0°, (b) 20°,and (c) 45°; the insets show the experimental images of the of thenear-field transmitted intensities.

FIG. 23: Measured (dotes) and predicted (solid curves) values of thenormalized Stokes parameters, (a) S₁/S₀, (b) S₂/ S₀, (c) S₃/ S₀, as afunction of the orientation of the QWP.

FIG. 24: Measured (dotes) and predicted results (solid curves) for (a)azimuthal angle ψ, and (b) ellipticity angle χ, as a function of theorientation of the QWP.

FIG. 25: The calculated (solid curve) and measured (circles) DOP as afunction of the intensity ratio of the two independent lasers havingorthogonal linear polarization states, as used in a setup depicted inthe top inset. The bottom inset shows calculated (solid curves) andmeasured (dots)-intensity cross-sections for the two extremes, I₁=I₂(DOP=0.059) and I₂=0 (DOP=0.975).

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

Several embodiments of geometrical phase optical elements withspace-variant subwavelength gratings and their implementations thereofare hereby presented, without derogating generality and without limitingthe scope of the present invention to these embodiments only.

1. Space-variant Pancharatnam-Berry Phase Optical Elements withSub-wavelength Gratings:

Space-variant Pancharatnam-Berry phase optical elements based oncomputer generated subwavelength gratings are presented herein. Bycontinuously controlling the local orientation and period of the gratingany desired phase element can be achieved. We present a theoreticalanalysis, and experimentally demonstrate a Pancharatnam-Berry phasebased diffractiortgrating for laser radiation at a wavelength of 10.6μm.

We consider optical phase elements based on the space-domainPancharatnamn-Berry phase. Unlike diffractive and refractive elements,the phase is not introduced through optical path differences, butresults from the geometrical phase that accompanies space-variantpolarization manipulation. The elements are polarization dependent,thereby enabling multi-purpose optical elements, suitable forapplications such as optical switching, optical interconnects and beamsplitting. We show that such elements can be realized using continuouscomputer-generated space-variant subwavelength dielectric gratings. Thecontinuity of the gratings ensures the continuity of the resulting fieldthereby eliminating diffraction associated with discontinuities, andenabling the fabrication of elements with high diffraction efficiency.We experimentally demonstrate Pancharatnam-Berry phase diffractiongratings for CO₂ laser radiation at a wavelength of 10.6 μm, showing anability to form complex polarization-dependent continuous phaseelements.

FIG. 1 illustrates the concept of Pancharatnam-Berry phase opticalelements (PBOEs) on the Poincare sphere. Circularly polarized light isincident on a waveplate with constant retardation and a continuouslyspace varying fast axis whose orientation is denoted by θ(x,y). We willshow that since the waveplate is space varying, the beam at differentpoints traverses different paths on the Poincare sphere, resulting in aspace-variant phase-front modification originating from thePancharatnam-Berry phase. Our goal is to utilize this space-variantgeometrical phase to form novel optical elements.

It is convenient to describe Pancharatnam-Berry Optical Elements (PBOEs)using Jones calculus. In this formalism, a waveplate with aspace-varying fast axis, is described by the operator,T(x,y)=R(θ(x,y))J(φ)R⁻¹ (θ(x,y)), where J(φ) is the operator for awaveplate with retardation φ, R is the operator for an optical rotatorand θ is the local orientation of the axis at each point (x,y). Forsimplicity, we work with the helicity basis in which |L

denotes left-hand circular polarization, and |R

denotes right-hand circular polarization. In this representation, T(x,y)has the explicit form, $\begin{matrix}{{T( {x,y} )} = {{{\cos( {\phi/2} )}\begin{bmatrix}1 & 0 \\0 & 1\end{bmatrix}} - {i\quad{{{\sin( {\phi/2} )}\begin{bmatrix}0 & {\exp( {{\mathbb{i}}\quad 2\quad{\theta( {x,y} )}} )} \\{\exp( {{- {\mathbb{i}}}\quad 2\quad{\theta( {x,y} )}} )} & 0\end{bmatrix}}.}}}} & (1)\end{matrix}$Thus, if a beam with polarization E_(i) is incident on T(x,y), theresulting beam has the explicit form,E ₀ =T(x,y)E _(i)=cos(φ/2)E _(i) −isin(φ/2)[

E _(i) |R

exp(−i2θ)|L+E _(i) |Lexp(i2θ)|R].   (2)Using Eq. (2) we can calculate the Pancharatnam phase-front of theresulting wave. We define this phase-front based on Pancharatnam'sdefinition for the phase between two beams of different polarization asφ_(p)(x,y)=arg[

E₀(0,0)|E₀(x,y)

]. This calculation yields that for incident |R

polarization,φ_(p)(x,y)=−θ+arctan[cosφtanθ]=−θ+arctan[sin(2χ)tan θ], where χ is theellipticity of the resulting beam. Geometrical calculations show thatφ_(p) is equal to half the area of the geodesic triangle, Ω on thePoincare sphere defined by the pole |R

, |E₀(0)

and |E₀(θ)

, as illustrated in FIG. 1, yielding the expected Pancharatnam-Berryphase. Similar results can be found for any incident polarization.

Consequently, if a circularly polarized beam is incident on aspace-variant polarization-state manipulator, it is subject togeometrical phase modification. Based on Eq. (2), the resulting waveconsists of two components, the zero order, and the diffracted order.The zero order has the same polarization as the original wavefront, anddoes not undergo any phase modification. On the other hand, thediffracted order has a polarization orthogonal to that of the incomingwave, and it's phase at each point is equal to twice the localorientation of the waveplate, θ(x,y). Since the phase modification ofthe wavefront is purely geometrical in origin, the phase of thediffracted orders must also be geometrical. We therefore define theDiffractive Geometrical Phase (DGP) as the phase of the diffractedorders when the incident beam is circularly polarized. For incident |R

and |L

polarizations the DGP is equal to −2θ(x,y) and 2θ(x,y) respectively. Bycorrectly determining the local orientation of the waveplate, anydesired DGP can be realized, enabling the realization of phase operatorssuch as lenses or diffraction gratings. Furthermore, since theorientation of the waveplate only varies from 0 to π, the DGP is definedmodulus 2π, and the elements are analogous to diffractive opticalelements. However, unlike diffractive optical elements the phasemodification in PBOEs does not result from optical path differences, butfrom polarization-state manipulation, and is intrinsically polarizationdependent, with the transmission function given by the matrix T(x,y) asdefined in Eq. (2). This equation also shows that the diffractionefficiency of the PBOEs depends on the retardation of the waveplate.

A case of special interest is φ=π. In this case, we find that thediffraction efficiency is 100%, and that |R

polarization is completely converted into |L

polarization. However, despite the fact that the resulting polarizationis space-invariant, The Pancharatnarn phase, φ_(p)=−2θ(x,y), is equal tothe DGP. This phase corresponds to half the area encompassed by twogeodesic paths between the poles that form an angle of 2θ with oneanother, as illustrated in FIG. 1. Thus, the DGP is equal to thegeometrical Pancharatnam-Berry phase of a PBOE with 100% diffractionefficiency. Note that PBOEs operate in different ways on the two helicpolarizations. Consequently, a PBOE lens designed for a wavelength λ,with focal length f, designed by choosing the direction of the waveplateso that 2θ(x,y)=πr²/λf|_(mod2π), will be a converging lens for |R

polarization, and a diverging lens for |L

polarization.

PBOEs can be realized using space-variant subwavelength gratings. Whenthe period of the grating is much smaller than the incident wavelength,the grating acts as a uniaxial crystal (Z. Bomzon, G. Biener, V. Kleinerand E. Hasman, ,Opt. Lett. 27, 188 (2002)). Therefore by correctlycontrolling the depth, structure, and orientation of the grating, thedesired PBOE can be made. To design a PBOE, we need to ensure that thedirection of the grating stripes, θ(x,y), is equal to half the desiredDGP which we denote as φ_(d)(x,y). Next we define a grating vector

K_(g)=K₀(x,y)[cos(φ_(d)(x,y)/2){circumflex over(x)}+sin(φ_(d)(x,y)/2)ŷ], where {circumflex over (x)} and ŷ are unitvectors in the x and y direction, K₀=2π/Λ(x,y) is the spatial frequencyof the grating (Λ is the local subwavelength period) and φ_(d)(x,y)/2 isthe space-variant direction of the vector defined so that it isperpendicular to the grating stripes at each point. Next, to ensure thecontinuity of the grating thereby ensuring the continuity of theresulting optical field, we require ∇×K_(g)=0, resulting in adifferential equation that can be solved to yield the local gratingperiod. The grating function φ_(g) (defined so that ∇φ_(g)=K_(g)) isthen found by integrating K_(g) over an arbitrary path (Z. Bomzon, V.Kleiner and E. Hasman, Opt. Lett. 26, 33 (2001)).

We designed a PBOE that acts as a diffraction grating by requiring thatφ_(d)=(2π/d)x|_(mod2π), where d is the period of the structure. Applyingthis to the grating vector and solving the equation ∇×K_(g)=0 yields,

K_(g)=(2π/Λ₀)exp−(πy/d)[cos(πx/d){circumflex over (x)}−sin(πx/d)ŷ],where Λ₀ is the subwavelength period at y=0. The grating function isthen found as

φ_(g)(x,y)=(2d/Λ₀)sin(πx/d)exp(−πy/d). We then realized a Lee-typebinary grating describing the grating function, φ_(g) (Z. Bomzon, V.Kleiner and E. Hasman, Opt. Commun. 192, 169 (2001)). The grating wasfabricated for CO₂ laser radiation with a wavelength of 10.6 μm, withΛ₀=2 μm and d=2.5 mm, and consisted of 12 periods of d. We formed thegrating with a maximum local subwavelength period of Λ=3.2 μm becausethe Wood anomaly occurs at 3.24 μm for GaAs. The grating was realizedonto a 500 μm thick GaAs wafer using contact printing photolithographyand electron-cyclotron resonance etching with BCl₃ to nominal depth of2.5 μm, to yield a retardation of φ=π/2. By combining two such gratingswe obtained a grating with retardation φ=π. FIG. 2 illustrates thegeometry of the grating, as well the DGP for incident |L

and |R

polarization states as calculated from Eq. (2). The DGPs resemble blazedgratings with opposite blazed directions for incident |L

and |R

polarization states, as expected from our previous discussions.

Following the fabrication, we illuminated the PBOEs with circular andlinear polarization. FIG. 3 shows the experimental images of thediffracted fields for the resulting beams, as well as theircross-sections when the retardation was φ=π/2 and φ=π respectively. Whenthe incident polarization is circular, and φ=π/2, close to 50% of thelight is diffracted according to the DGP into the first order (thedirection of diffraction depends on the incident polarization), whilstthe other 50% remains undiffracted in the zero order as expected fromEq. (2). The polarization of the diffracted order has switched helicityas expected. For φ=π, no energy appears in the zero order, and thediffraction efficiency is close to 100%. When the incident polarizationis linear E_(i)=1/√{square root over (2)}(|R

+|L

), the two helic components of the beam are subject to different DGPs ofopposite sign, and are diffracted to the first orders in differentdirections. When φ=π/2, the zero order maintains the originalpolarization, in agreement with Eq. (2), whereas for retardation π thediffraction is 100% efficient for both circular polarizations, and noenergy is observable in the zero order.

To conclude, we have demonstrated novel polarization-dependent opticalelements based on the Pancharatnam-Berry phase. Unlike conventionalelements, PBOEs are not based on optical path difference, but ongeometrical phase modification resulting from space-variant polarizationmanipulation.

2. Polarization Beam-splitters and Optical Switches Based onSpace-variant Computer Generated Subwavelength Quasi-periodicStructures:

Polarization beam-splitters and optical switches based on subwavelengthquasi-periodic structures are presented. By locally controlling theorientation and period of the subwavelength grooves, birefringentelements for which the optical axes vary periodically, are realized. Wepresent a theoretical discussion of these elements, as well as adetailed description of the design and realization procedures. We showexperimental results for infra-red radiation at a wavelength of 10.6 μm.

Polarizing beam-splitters are essential components in polarization-basedsystems such as ellipsometers, magneto-optic data storage andpolarization-based light modulators. Often these applications requirethat the elements provide high extinction ratios over a wide angularbandwidth while maintaining compact and efficient packaging.Conventional polarizing beam-splitters, employing either natural crystalbirefringence or polarization-sensitive multilayer structures areusually, either cumbersome or sensitive to angular change, and thereforedo not fully meet these requirements.

Contemporary research has begun to address the use of polarizationdiffraction gratings as beam-splitters and optical switches. Unlikescalar diffraction gratings that are based on periodic modification ofphase and amplitude, polarization diffraction gratings introduce aperiodic spatial change of the state of polarization leading topolarization-dependent diffraction. Furthermore, the polarization of thediffracted orders is generally different from that of the incident beam.Such a device was demonstrated by Davis et al, who used liquid crystalsto create a waveplate with space-varying retardation (J. A. Davis, J.Adachi, C. R. Fernández-Pousa and I. Moreno, Opt. Lett. 26, (2001)587-589). Alternatively, Gori suggested a grating consisting of apolarizer with a spatially rotating transmission axis (F. Gori, Opt.Lett. 24, (1999) 584-586) and Tervo and Turunen suggested thatbeam-splitters consisting of spatially rotating wave-plates could berealized using subwavelength gratings (J. Tervo and J. Turunen, Opt.Lett. 25, (2000) 785-786). More recently a polarization diffractiongrating based on spatially rotating nematic liquid crystals has beendemonstrated (B. Wen, R. G. Petschek and C. Rosenblat, Appl. Opt. 41,(2002) 1246-1250).

Space-variant polarization-state manipulations using computer-generatedsubwavelength structures were disclosed (Z. Bomzon, V. Kleiner and E.Hasman, Opt. Commun 192, (2001) 169-181, Z. Bomzon, V. Kleiner and E.Hasman, Opt. Lett. 26, (2001) 33-35, and Z. Bomzon, G. Biener, V.Kleiner, E. Hasman, Optics Lett. 27, (2002) 285-287). When the period ofa subwavelength periodic structure is smaller than the incidentwavelength, only the zeroth order is a propagating order, and all otherorders are evanescent. The subwavelength periodic structure behaves as auniaxial crystal with the optical axes parallel and perpendicular to thesubwavelength grooves. Therefore, by fabricating quasi-periodicsubwavelength structures, for which the period and orientation of thesubwavelength grooves was space-varying, we realized continuouslyrotating waveplates and polarizers for CO₂ laser radiation at awavelength of 10.6 μm. Furthermore, we showed that such polarizationmanipulations necessarily led to phase modification of geometricalorigin, which left a clear signature on the propagation of the resultingwave. The phase introduced did not result from optical path differencesbut solely from local changes in polarization and was in-fact amanifestation of the geometrical Pancharatnam-Beny phase (Z. Bomzon, V.Kleiner and E. Hasman, Opt. Lett. 26, (2001) 1424-1426).

Disclosed herein is an experimental demonstration of polarizationdiffraction gratings based on space-variant computer-generatedsubwavelength structures. We present a novel interpretation of theseelements and show that the polarization-related diffraction is indeedconnected to the space-varying Pancharatnam-Berry phase mentioned above.We present experimental results for infra-red CO₂ laser radiation thatinclude a polarization diffraction grating based on a space-variantcontinuous metal-stripe subwavelength structure, a continuously rotatingdielectric subwavelength structure and a binary waveplate, for which thedirection of the subwavelength grooves varies discretely. We alsodemonstrate a circular symmetric polarization mode switching based on acomputer-generated subwavelength structure, thus enabling alternationbetween intensity distributions of a bright and dark center.

FIG. 4 is a schematic representation of the use of a subwavelengthstructure as a polarization diffraction grating. The local orientationof the subwavelength grooves, θ(x), varies linearly in the x-direction,to form a polarization diffraction grating comprising a birefringentelement with optical axes (which are parallel and perpendicular to thegrating grooves) that rotate periodically in the x-direction. The periodof the polarization diffraction grating, d, is larger than the incidentwavelength, λ, whereas the local subwavelength period of the grooves,Λ(x,y), is smaller than the incident wavelength. When a plane-wave withuniform polarization is incident on such a periodic subwavelengthstructure, the transmitted field will be periodic in both polarizationand phase, therefore, we can expect this field to yield discretediffraction orders in the far-field.

It is convenient to describe subwavelength quasi-periodic structuressuch as the one depicted in FIG. 4 using Jones Calculus. In thisrepresentation, a uniform periodic subwavelength structure the groovesof which are oriented along the y-axis can be described by the Jonesmatrix, $\begin{matrix}{{J = \begin{pmatrix}t_{x} & 0 \\0 & {t_{y}{\mathbb{e}}^{\mathbb{i}\phi}}\end{pmatrix}},} & (1)\end{matrix}$where t_(x), t_(y) are the real amplitude transmission coefficients forlight polarized perpendicular and parallel to the optical axes and φ isthe retardation of the grating. If the orientation of the subwavelengthgrooves is space-varying, i.e. different at each location, then thesubwavelength structure can be described by the space-dependent matrix,T _(C)(x)=M(θ(x))JM ⁻¹(θ(x)),   (2)where θ(x) is the local orientation of the optical axis and${M(\theta)} = \begin{pmatrix}{\cos\quad\theta} & {{- \sin}\quad\theta} \\{\sin\quad\theta} & {\cos\quad\theta}\end{pmatrix}$is a two-dimensional rotation matrix.

For convenience we adopt the Dirac bra-ket notation, and convert T_(C)(x) to the helicity base in which$ R \rangle = {{\begin{pmatrix}1 \\0\end{pmatrix}\quad{and}\quad L \rangle} = \begin{pmatrix}0 \\1\end{pmatrix}}$are the two-dimensional unit vectors for right-hand and left- handcircularly polarized light. In this base, the space-variant polarizationoperator is described by the matrix, T(x)=UT_(C)U⁻¹, where$U = {\frac{1}{\sqrt{2}}\begin{pmatrix}1 & 1 \\{- i} & i\end{pmatrix}}$is a unitary conversion matrix. Explicit calculation of T(x) yields,$\begin{matrix}{{{T(x)} = {{\frac{1}{2}( {t_{x} + {t_{y}{\mathbb{e}}^{\mathbb{i}\phi}}} )\begin{pmatrix}1 & 0 \\0 & 1\end{pmatrix}} + {\frac{1}{2}( {t_{x} - {t_{y}{\mathbb{e}}^{{\mathbb{i}}\quad\phi}}} )\begin{pmatrix}0 & {\exp\lbrack {{\mathbb{i}2}\quad{\theta(x)}} \rbrack} \\{\exp\lbrack {{- {\mathbb{i}2}}\quad{\theta(x)}} \rbrack} & 0\end{pmatrix}}}},} & (3)\end{matrix}$Thus for an incident plane-wave with arbitrary polarization |E_(in)

we find that the resulting field is, $\begin{matrix}{{ E_{out} \rangle = {{\sqrt{\eta_{E}} E_{i\quad n} \rangle} + {\sqrt{\eta_{R}}{\mathbb{e}}^{{\mathbb{i}2}\quad{\theta{({x,y})}}} R \rangle} + {\sqrt{\eta\quad L}{\mathbb{e}}^{{- {\mathbb{i}}}\quad 2{\theta{({x,y})}}} L \rangle}}},{{{where}\quad\eta_{E}} = {{\frac{1}{2}( {t_{x} + {t_{y}{\mathbb{e}}^{{\mathbb{i}}\quad\phi}}} )}}^{2}},{\eta_{R} = { {\frac{1}{2}( {t_{x} - {t_{y}{\mathbb{e}}^{{\mathbb{i}}\quad\phi}}} )\langle E_{i\quad n} L} \rangle{^{2}{,{\eta_{L} = { {\frac{1}{2}( {t_{x} - {t_{y}{\mathbb{e}}^{{\mathbb{i}}\quad\phi}}} )\langle E_{i\quad n} R} \rangle{^{2},}}}}}}}} & (4)\end{matrix}$are the polarization order coupling efficiencies and

α|β

denotes inner product.

FIG. 5 is a graphic representation of the results of Eq. (4). It showsthat |E_(out)

comprises three polarization orders; the |E_(in)

polarization order (EPO), the |R

polarization order (RPO) and the |L

polarization order (LPO). The EPO maintains the polarization and phaseof the incident beam, whereas the phase of the RPO is equal to 2η(x),and the phase of the LPO is equal to −2θ(x). We note that the phasemodification of the |R

and the |L

polarization orders results solely from local changes in polarizationand is therefore geometrical in nature. We therefore denote this phaseas the Diffractive Geometrical Phase (DGP) (Z. Bomzon, G. Biener, V.Keiner and E. Hasman, “Space-variant Pancharatnam Berry phase opticalelements with computer-generated subwavelength gratings”, Opt. Lett, inpress, (2002)).

The DGP for the |R

polarization order is opposite in sign to that of the |L

polarization order, and if θ(x) is periodic, the functions e^(i2θ(x))and e^(−i2θ(x)) that appear in Eq. (4) can be developed into Fourierseries. Taking into account the connection between the Fourier series ofa function and the Fourier series of its complex conjugate, this leadsto the equation, $\begin{matrix}{{ E_{out} \rangle = {{\sqrt{\eta_{0}} E_{i\quad n} \rangle} + {\sqrt{\eta_{R}}{\sum\limits_{m = {- \infty}}^{\infty}{a_{m}{\mathbb{e}}^{{\mathbb{i}}\quad 2\pi\quad{{nx}/d}} R \rangle}}} + {\sqrt{\eta_{L}}{\sum\limits_{m = {- \infty}}^{\infty}{a_{- m}^{*}{\mathbb{e}}^{{\mathbb{i}2}\quad\pi\quad n\quad{x/d}} L \rangle}}}}},{{{where}\quad a_{m}} = {\frac{1}{2\pi}{\int{{\mathbb{e}}^{{\mathbb{i}2\theta}{(x)}}{\mathbb{e}}^{{\mathbb{i}}\quad 2\pi\quad{{nx}/d}}{{\mathbb{d}x}.}}}}}} & (5)\end{matrix}$Thus we find that the diffraction efficiency into the m^(th) order ofthe RPO (η_(m) ^(R)=|α_(m)|²), is equal to the diffraction efficiencyinto the −m^(th) order of the LPO (η_(−m) ^(L)=|α_(m) ^(·)|²), andconclude that the RPO and LPO are diffracted in opposite senses.

Based on Eqs. (4-5) we find that there are three degrees of freedomassociated with the design of polarization diffraction gratings. Thefirst degree of freedom is the determination of the subwavelengthstructure parameters, t_(x), t_(y) and φ. These parameters determine theamount of energy coupled into the EPO. The second degree of freedom isthe grating orientation θ(x). θ(x) that determines the DGP, therebydetermining the diffraction efficiency into all diffraction orders. Thethird degree of freedom is the incident polarization |E_(in)

. It determines the ratio between the energy in the RPO and the energyin the LPO. In the next paragraphs, we intend to demonstrate how thesethree degrees of freedom can be utilized for the design and realizationof polarization beam-splitters and optical switches using subwavelengthquasi-periodic structures.

Supposing we wish to design a blazed polarization diffraction grating,i.e. a grating for which all the diffracted energy is in the 1^(st)order when the incident beam is |R

polarized. For |E_(in)

=|R

we find that η_(R)=0. Consequently the transmitted beam only consists ofthe LPO and the EPO. Since the EPO does not undergo any phasemodification, all of its energy is located in the zero order, and theonly order that contributes energy to the 1^(st) order is the LPO. Inorder to ensure that all the energy of the LPO will be diffracted intothe 1^(st) order, it is required that the DGP for the LPO be equal to2πx/d|_(mod2π). Consequently, we find that θ(x)=−πx/d|_(modπ). Next, inorder to ensure that no energy is found in the zero-order, we requirethat η_(ε)=0. This condition leads to the solution t_(x)=t_(y) and φ=π.Thus by determining the incident polarization, |E_(in)

, the grating orientation, θ(x), and the grating parameters t_(x)=t_(y)and φ=π, we are able to create the desired diffraction pattern.

In addition, we note that for such a grating, the DGP for the RPO is2θ(x)=−2πx/d|_(mod2π), and therefore if |E_(in)

=|L

, the grating is blazed in the opposite direction. Thus for arbitraryincident polarization, the diffracted energy will be distributed betweenthe 1^(st) and −1^(st) orders. The distribution is dependent on thepolarization of the incident beam. Furthermore, the polarization in the1^(st) order will always be |L

, and the polarization in the −1^(st) order will always be |R

. Thus, by switching the incident polarization between an |L

state and an |R

state, an optical switch can be realized. Furthermore, if we choose φ≠π,then some of the incident energy will be coupled into the EPO, resultingin the appearance of a zero-order that maintains the polarization of theincident beam, thereby demonstrating the usefulness of such a device asa variable polarization-dependent beam splitter.

We now focus our attention on the design of the blazed grating discussedabove using a quasi-periodic subwavelength structure. Since thedetermination of the grating parameters t_(x), t_(y) and φ depend mainlyon the subwavelength groove profile, and not on the subwavelength grooveorientation, we begin by determining the desired subwavelength grooveorientation, θ(x), and period, Λ(x,y), for the subwavelength structurewith the desired DGP. The grating parameters t_(x), t_(y) and φ arelater determined by choosing a fabrication process that yields a gratingprofile with the desired birefringence.

To design a continuous subwavelength structure with the desired DGP, wedefine a subwavelength grating vector, K_(g) (x,y), orientedperpendicular to the desired subwavelength grooves,K _(g)(x,y)=K₀(x,y)cos(πx/d){circumflex over (x)}−K ₀(x,y)sin(πx/d)ŷ.  (6)

K₀(x,y)=2π/Λ(x,y) is yet to be determined as the local spatial frequencyof the subwavelength structure. FIG. 6(c) illustrates this definition ofK_(g)(x,y). To ensure the continuity of the subwavelength grooves, werequire that ∇×K_(g)=0, leading to the partial differential equation,$\begin{matrix}{{{{\frac{\partial K_{o}}{\partial y}{\cos( {\pi\quad{x/d}} )}} + {\frac{\partial K_{o}}{\partial x}{\sin( {\pi\quad{x/d}} )}} + {\frac{\pi}{d}K_{0}{\cos( {\pi\quad{x/d}} )}}} = 0},} & (7)\end{matrix}$with the boundary condition K₀(x,0)=2π/Λ₀, where Λ₀ is the localsubwavelength period at y=0. The solution to this problem is given by,$\begin{matrix}{{K_{g}( {x,y} )} = {\frac{2\pi}{\Lambda_{0}}{{{\exp( {{- \pi}\quad{y/d}} )}\lbrack {{{\cos( {\pi\quad{x/d}} )}\hat{x}} - {{\sin( {\pi\quad{x/d}} )}\hat{y}}} \rbrack}.}}} & (8)\end{matrix}$Consequently, the grating function is then found by integrating K_(g)over an arbitrary path to yield, $\begin{matrix}{{\phi_{g}( {x,y} )} = {\frac{2d}{\Lambda_{0}}{\sin( {\pi\quad{x/d}} )}{\exp( {{- \pi}\quad{y/d}} )}}} & (9)\end{matrix}$

We realized a Lee-type binary subwavelength structure mask (see W. H.Lee, Appl. Optics 13, (1974) 1677-1682) described by the gratingfunction of Eq. (9) using high-resolution laser lithography. Theamplitude transmission for such a Lee-type binary mask can be derivedas,t(x,y)=U _(s)[cos(φ_(h))−cos(πq)],   (10)where U_(s) is the unit step function defined by,${U_{s}(\eta)} = \{ {\begin{matrix}{1,} & {\eta \geq 0} \\{0,} & {\eta \geq 0}\end{matrix},} $and where q is the duty cycle of the grating which was chosen as 0.5.FIG. 6 illustrates the geometry of a Lee-type binary subwavelength, aswell as the resulting DGPs for the RPO and the LPO formed by thisstructure. The figure shows a continuous quasi-periodic subwavelengthstructure with a local subwavelength period Λ(x,y) where at eachlocation on the element, the grooves are oriented perpendicular to therequired fast-axis, resulting in the desired polarization diffractiongrating. The resulting DGPs resemble the phase function of a scalarblazed grating. The RPO is blazed in the opposite direction of the LPOas discussed above. Hence, incident |R

polarization is diffracted in the opposite direction of incident |L

polarization. The local subwavelength periodicity gives the structureits birefringence, whilst the continuity of the subwavelength groovesensures the continuity of the resulting field. Furthermore, we note thespace-varying nature of Λ(x,y). This is a necessary result for therequirement of continuity posed on the subwavelength grooves.

We realized three different subwavelength structures with the geometryshown in FIG. 6. The first element was realized as a metal stripesubwavelength structure using contact photolithography and lift-off, andthe other two elements were dielectric gratings realized using contactphotolithography and dry etching techniques. The elements were realizedfor CO₂ laser radiation at a wavelength of 10.6 μm on 500 μm thick GaAswafers. We fabricated the gratings with Λ₀=2 μm, and d=2.5 mm,consisting of 12 periods of d. The gratings were formed with maximumlocal subwavelength period of Λ=3.2 μm because the Wood anomaly occursat 3.24,μm for GaAs. The metal stripes consisted of a 10 nm adhesionlayer of Ti and 60 nm Au with a duty cycle of 0.6 yielding measuredvalues of t_(x)=0.6, t_(y)=0.2, and φ=0.6π. The dielectric gratings werefabricated using electron-cyclotron resonance etching with BCl₃ tonominal depth of 2.5 μm and duty cycle of 0.5, resulting in measuredvalues of a retardation φ=π/2, and t_(x)=t_(y)=0.9. By combining twosuch gratings, we obtained a grating with retardation φ=π, andt_(x)=t_(y)=0.89. These values are close to the theoretical predictionsachieved using rigorous coupled wave analysis (M. G. Moharam and T. K.Gaylord, J. Opt. Soc. Am. A 3, (1986) 1780-1787). FIG. 6(d) shows ascanning electron microscope image of one of the dielectric structures.We note the local periodicity of the structure and the clear profile ofthe subwavelength grooves.

Following the fabrication we illuminated the structures with polarizedlight. FIG. 7 shows images of the far-field intensity distributions ofthe transmitted beams, as well the measured and predicted intensitycross-sections for incident |R

polarization, for incident |L

polarization and for incident linear polarization (|E_(in)

=|↑

) There is a good agreement between experiment and theory, which wascalculated using Eq. (4), and far-field Fraunhoffer intensities. Forincident |R

polarization only the zero order and the 1^(st) order appear. The zeroorder is due to the EPO, and maintains the polarization of the incidentbeam, whereas the 1^(st) order is derived from the LPO and has |L

polarization. For incident |L

polarization, the zero-order and the −1^(st) order appear, and thepolarization of the −1^(st) order is |R

. In the case of incident linear polarization, we note the linearpolarization of the zero order, the |L

polarization of the 1^(st) order and the

|R

polarization of the −1^(st) order as discussed above. We note that forthe grating in which t_(x)=t_(y)=0.89 and φ=π, η_(ε)=0, consequently,all of the energy is diffracted into the 1^(st) and −1^(st) orders, asexpected.

FIG. 8 shows the predicted and measured diffraction efficiencies for thethree blazed polarization diffraction gratings for various incidentpolarization states. The diffraction efficiencies are normalizedrelative to the total transmitted intensity. The differentpolarization-states were achieved by rotating a quarter wave-plate infront of the linearly polarized light emitted from the laser. Theexperiments agree with the predictions. The diffraction efficiency inthe zero-order is equal to η_(ε). It has a different value for each ofthe grating, however, for each grating, it remains constant regardlessof the incident polarization. On the other hand, the diffraction intothe 1^(st) and −1^(st) orders depends on the incident polarization,illustrating the usefulness of polarization diffraction gratings asvariable polarization beam-splitters and light modulators.

To further examine the use of polarization diffraction gratings as beamsplitters and optical switches, we fabricated a binary polarizationdiffraction grating using a subwavelength dielectric structure. Eachperiod, d, (d>λ), of the grating is comprised of two regions. Thesubwavelength grating vector in the first region pointed along thex-axis, and the subwavelength grating vector in the second regionpointed along the y-axis. i.e, $\begin{matrix}{{\theta(x)} = \{ {\begin{matrix}{0} & {0 < x < {d/2}} \\{\pi/2} & {{d/2} < x < d}\end{matrix}.} } & (11)\end{matrix}$

We fabricated the subwavelength structure on a GaAs wafer witht_(x)=0.95, t_(y)=0.84, and φ=0.45π. The structure was fabricated withd=200 μm and Λ(x,y)=2 μm. FIG. 9 shows a schematic representation of thesubwavelength structure, a graph depicting the resulting DGP andscanning electron microscope images of the subwavelength structure whichwe had fabricated. We note that the DGP is the same for both the RPO andthe LPO. It resembles a scalar binary π-phase grating. Consequently thediffraction efficiencies for both the RPO and the LPO, will be the sameas those of a scalar binary π-phase grating (E. Hasman, N. Davidson, andA. A. Friesem, Opt. Lett. 16, (1991) 423-425), i.e., $\begin{matrix}{\eta_{m}^{R} = {\eta_{m}^{L} = {\frac{4\quad{\sin^{2}( {m\quad{\pi/2}} )}}{( {m\quad\pi} )^{2}}.}}} & (12)\end{matrix}$Note that for a binary π-phase grating only the odd orders appear andconsequently η₀ ^(L) =η₀ ^(R)=0. Furthermore, Eq. (12) yields that η₁^(L,R)=η⁻¹ ^(L,R)=0.405, and η₃ ^(L,R)=η⁻³ ^(L,R)=0.045.

FIG. 10 shows the measured diffraction efficiencies when the incidentbeam has (FIGS. 7(a,b)) circular and (FIG. 10(c)) linear polarization,as well as the efficiency when the transmitted beam has passed through acircular polarizer oriented to transmit |R

polarized light (FIGS. 10(d-f)). We note that when the beam does notpass through a circular polarizer, the intensity in the variousdiffracted orders is not dependent upon the incident polarization,however the polarization-state of the diffracted orders does depend onthe incident polarization. We note that the intensity of the diffractedorders on the right is equal to the intensity of the diffracted orderson the left, indicative of symmetrical phase structure of the DGP.Furthermore the ratio between the intensity in the 1^(st) and 3^(rd)orders is η₁/η₃≈9, in agreement with Eq. (12), providing furtherverification of the binary π-phase of the DGP. In addition, for incident|R

polarization, the experimental ratio between the intensities in the zeroorder and in the 1^(st) order is 3.376. This agrees with the predictedratio of η_(ε)/(η_(L)η₁^(L))=[|t_(x)+t_(y)e^(iφ)|²/0.405|t_(x)−t_(y)e^(φ)|²], as predictedusing Eqs. (4, 12). When a circular polarizer, oriented to transmit only|R

polarized light is applied to the beam, we notice that for incident |R

polarization (FIG. 10(e)) only the zero order appears. (this is becauseη_(R)=0). For incident |L

polarization (FIG. 10(d)) only the orders other than the zero orderappear (this is because the EPO has |L

polarization), 5 and for incident linear polarization (FIG. 10(f)) alldiffracted orders appear (this is due all three orders being linearlypolarized). Thus, by placing a polarization modulator such as a liquidcrystal cell in front of a setup, comprising a polarization-diffractiongrating and a circular polarizer, an optical switch could be assembledfor applications such as optical interconnections in communications.

Until now we have discussed polarization beam splitting and opticalswitching by use of polarization diffraction gratings. However,sometimes a different geometry is required. Suppose for instance, wewish to create an optical switch that enables switching between anoptical circularly symmetric mode with a bright center, and an opticalcircularly symmetric mode with a dark center. This can be done with aquasi-periodic subwavelength structure for which, θ(x,y)=ω(x,y)+c, whereω=arctan(y/x) is the azimuthal angle, and c is a constant number. TheDGP of the RPO for such an element is equal to 2(ω(x,y)+c). Thus the RPOcarries a vortex with a topological charge of 2 (D. Rozas, C. T. Law andG. A. Swartzlander Jr., J. Opt. Soc. Am. B. 14, (1997) 3054-3065), andtherefore it has a dark center. Furthermore, since the EPO does notundergo any phase modification, its topological charge is zero, and itexhibits a bright center. Therefore, if we design a quasi-periodicsubwavelength structure with θ(x,y)=ω(x,y)+c, choose φ≠π, and illuminateit with |L

polarization, the resulting beam will comprise an |R

polarized vortex carrying beam with a dark center and an |L

polarized beam with a bright center. We can switch between the two modesusing a circular polarizer.

We realized such a quasi-periodic subwavelength structure on a GaAswafer, with θ(x,y)=ω(x,y)+π/4, yielding a grating function

φ_(g)=(2πr₀/√{square root over (2)}Λ₀)[ln(r/r₀)−ω], where r is a radialcoordinate. We chose Λ₀=2 μm and r₀=5 mm, so that 5 mm<r<8 mm and 2μm<Λ<3.2 μm, and fabricated a dielectric grating with retardation ofφ=or π/2. Note that for incident |L

polarization, the transmitted beam had radial polarization in the nearfield, and that for incident |R

polarization, the near field had azimuthal polarization. FIG. 11 showsfar-field images and the measured and calculated cross-sections of (a)the transmitted beam when the incident polarization is |L

as well as the far-field image of the (b) |L

and (c) |R

components of the beam as obtained with a circular polarizer. FIG. 11also shows the geometry of the subwavelength quasi-periodic structure aswell as the DGP caused by this element. We note the clear vortex in theDGP. The dark center of the vortex is evident in the measured resultswhere we note that the |L

component of the transmitted beam (the EPO), has a bright center withoutundergoing any phase modification, whereas the |R

component (RPO) has a dark center, clearly indicative of its topologicalcharge. The results clearly demonstrate the circularly symmetric modeswitching, which can be realized using subwavelength periodicstructures.

To conclude, we have demonstrated polarization diffraction gratings aspolarization-sensitive beam-splitters, as well as optical switches. Wehave demonstrated that the application of subwavelength quasi-periodicstructures, for this purpose, is not limited to optical switches basedon linear polarization diffraction gratings, and that more complexdesigns are possible. The introduction of space-varying geometricalphases through space-variant polarization manipulations, enables newapproaches for beam-splitting and the fabrication of novelpolarization-sensitive optical elements.

3. Formation of Helical Beams Using Pancharatnam-Berry Phase OpticsElements:

Spiral phase elements with different topological charges based onspace-variant Pancharatnam-Berry phase optical elements are presented.Such elements can be realized using continuous computer-generatedspace-variant subwavelength dielectric gratings. We present atheoretical analysis and experimentally demonstrate spiral geometricalphases for infra-red radiation at a wavelength of 10.6 μm.

Recent years have witnessed a growing interest in helical beams that areexploited in a variety of applications. These include trapping of atomsand macroscopic particles, transferring of orbital angular momentum tomacroscopic objects, rotational frequency shifting, the study of opticalvortices, and specialized alignment schemes. Beams with helical (orspiral) wavefronts are described by complex amplitudes u(r,ω,)∝exp(−ilω), where r, ω, are the cylindrical coordinates, the radialcoordinate and azimuthal angle respectively, and l is the topologicalcharge of the beams. At the center, the phase has a screw dislocation,also called a phase singularity, or optical vortex. Typically, helicalbeams are formed by manipulating the light after it emerges from a laserby superposition of two orthogonal (non-helical) beams, or bytransforming Gaussian beams into helical beams by means ofcomputer-generated holograms, cylindrical lenses and spiral phaseelements (SPEs).

Alternatively, a helical beam can be generated inside a laser cavity byinserting SPEs into the laser cavity. The common approaches of formingSPE are as refractive or diffractive optical elements using a millingtool, single-stage etching process with a gray-scale mask, or withmultistage etching process. Such helical beam formations are generallyeither cumbersome or suffer from complicated realization, highaberrations, low efficiency, or large and unstable setup.

In the present invention novel spiral phase elements (SPEs) aredisclosed based on the space-domain Pancharatnam-Berry phase. Unlikediffractive and refractive elements, the phase is not introduced throughoptical path differences, but results from the geometrical phase thataccompanies space-variant polarization manipulation. We show that suchelements can be realized using continuous computer-generatedspace-variant subwavelength dielectric gratings. Moreover, weexperimentally demonstrate SPEs with different topological charges basedon a Pancharatnam-Berry phase manipulation, with an axial symmetriclocal subwavelength groove orientation, for CO₂ laser radiation at awavelength of 10.6 μm.

The formation of PBOE with spiral geometrical phase, indicates anability to form complex continuous PBOEs.

The PBOEs are considered as waveplates with constant retardation andcontinuously space varying fast axes, the orientation of which isdenoted by θ(r, ω). It is convenient to describe PBOEs using Jonescalculus. The space-dependent transmission matrix for the PBOE is givenby applying the optical rotator matrix on the Jones matrix of thesubwavelength dielectric grating to yield in helical basis,$\begin{matrix}{{{T( {r,\omega} )} = {{\frac{1}{2}( {t_{x} + {t_{y}{\mathbb{e}}^{{\mathbb{i}}\quad\phi}}} )\begin{pmatrix}1 & 0 \\0 & 1\end{pmatrix}} + {\frac{1}{2}( {t_{x} - {t_{y}{\mathbb{e}}^{{\mathbb{i}}\quad\phi}}} )\begin{pmatrix}0 & {\exp\lbrack {{\mathbb{i}}\quad 2{\theta( {r,\omega} )}} \rbrack} \\{\exp\lbrack {{- {\mathbb{i}}}\quad 2{\theta( {r,\omega} )}} \rbrack} & 0\end{pmatrix}}}},} & (1)\end{matrix}$where t_(x), t_(y) are the real amplitude transmission coefficients forlight polarized perpendicular and parallel to the optical axes, and φ isthe retardation of the grating. Thus for an incident plane-wave witharbitrary polarization |E_(in)

we find that the resulting field is, $\begin{matrix}{{ E_{out} \rangle = {{\sqrt{\eta_{E}} E_{i\quad n} \rangle} + {\sqrt{\eta_{R}}{\mathbb{e}}^{{\mathbb{i}}\quad 2{\theta{({r,\omega})}}} R \rangle} + {\sqrt{\eta_{L}}{\mathbb{e}}^{{\mathbb{i}2}\quad{\theta{({r,\omega})}}} L \rangle}}},{{{where}\quad\eta_{E}} = {{\frac{1}{2}( {t_{x} + {t_{y}{\mathbb{e}}^{{\mathbb{i}}\quad\phi}}} )}}^{2}},{\eta_{R} = { {\frac{1}{2}( {t_{x} + {t_{y}{\mathbb{e}}^{{\mathbb{i}}\quad\phi}}} )\langle E_{i\quad n} L} \rangle{^{2}{,{\eta_{L} =  {\frac{1}{2}( {t_{x} + {t_{y}{\mathbb{e}}^{{\mathbb{i}}\quad\phi}}} )\langle E_{i\quad n} L} \rangle}}}^{2}}}} & (2)\end{matrix}$are the polarization order coupling efficiencies,

α|

denotes inner product, and |R

=(1 0)^(T) and |L

=(0 1)^(T) represent the right-hand and left-hand circular polarizationcomponents respectively. From Eq. (2) one can see that the emerging beamfrom a PBOE comprises three polarization orders. The first maintains theoriginal polarization state and phase of the incident beam, the secondis right-hand circular polarized and has a phase modification of 2θ(r,ω), and the third is opposite to the second at polarization hand and atphase modification. Note that the polarization efficiencies depend onthe groove shape and material as well as on the polarization state ofthe incident beam. For the substantial case of t_(x)=t_(y)=1, and φ=π anincident wave with |R

polarization is subject to entire polarization state conversion andresults in emerging field,|E _(out) =e ^(−i2θ(r,ω))|L

.   (3)An important feature of Eq. (3) is that the phase factor depends on thelocal orientation of the subwavelength grating. This dependence isgeometrical in nature and originates solely from local changes in thepolarization state of the emerging beam. This can be illustrated usingthe Poincare sphere, representing a polarization state by three Stokesparameters S₁, S₂ and S₃ as depicted in FIG. 12(a). The incident rightpolarized and the transmitted left polarized waves correspond to thenorth and the south poles of the sphere, respectively. Since thesubwavelength grating is space varying, the beam at different pointstraverses different paths on the Poincare sphere. For instance, thegeodesic lines

and

represent different paths for two waves transmitted through elementdomains of different local orientations θ(r,0) and θ(r,ω). Geometricalcalculations show that the phase difference φ_(p)=−2θ(r,ω) betweenstates corresponding to θ(r,0) and θ(r,ω) orientations, is equal to halfof the area Ω enclosed by the geodesic lines

and

. This fact is in compliance with the well-known rule, proposed byPancharatnam, for comparing the phase of two light beams with differentpolarization, and can be considered as an extension of the mentionedrule into the space-domain.

In order to design a continuous subwavelength structure with the desiredphase modification, we define a space-variant subwavelength gratingvector K_(g)(r,ω), oriented perpendicular to the desired subwavelengthgrooves. FIG. 12(b) illustrates this geometrical definition of thegrating vector. To design a PBOE with spiral geometrical phase, we needto ensure that the direction of the grating grooves is given byθ(r,ω)=lω/2, where l is the topological charge. Therefore, using FIG.12(b), the grating vector is given by,

K_(g)(r,ω)=K₀(r,ω){cos[(l/2−1)ω]{circumflex over(r)}+sin[(l/2−1)ω]{circumflex over (ω)}}, where

K₀=2π/Λ(r,ω) is the local spatial frequency of grating with local periodof Λ(r,ω). To ensure the continuity of the subwavelength grooves, werequire that ∇×K_(g)=0, resulting in a differential equation that can besolved to yield the local grating period. The solution to this problemyields K₀(r)=(2π/Λ₀)(r₀/r)^(1/2), where Λ₀ is the local subwavelengthperiod at r=r₀. Consequently, the grating function φ_(g) (defined sothat K_(g)=∇φ_(g)) is then found by integrating K_(g)(r,ω) over anarbitrary path to yield,

φ_(g)(r,ω)=(2πr₀/Λ₀)(r₀/r)^(l/2−1)cos[(l/2−1)ω]/ [l/2−1] for l≠2, and

φ_(g)(r,ω)=(2πr₀/Λ₀)ln(r/r₀) for l=2. We then realized a Lee-type binarygrating describing the grating function, φ_(g), for l=1,2,3,4. Thegrating was fabricated for CO₂ laser radiation with a wavelength of 10.6μm, with Λ₀=2 μm, r₀=4.7 mm, and a maximum radius of 6 mm resulting in 2μm≦Λ(r)≦3.2 μm. We formed the grating with a maximum local period of 3.2μm in order not to exceed the Wood anomaly of GaAs. The magnifiedgeometry of the gratings for different topological charges are presentedin FIG. 2. The elements were fabricated on 500 μm thick GaAs wafersusing contact photolithography and electron-cyclotron resonance etchingwith BCl₃ to nominal depth of 2.5 μm, resulting in measured values ofretardation φ=π/2, and t_(x)=t_(y)=0.9. These values are close to thetheoretical predictions achieved using rigorous coupled wave analysis.The inset in FIG. 2 shows a scanning electron microscope image of one ofthe dielectric structures.

Following the fabrication, the spiral PBOEs were illuminated with aright hand circularly polarized beam, |R

, at 10.6 μm wavelength. In order to provide experimental evidence ofthe resulting spiral phase modification of our PBOEs, we used“self-interferogram” measurement using PBOEs with retardation φ=π/2. Forsuch elements the transmitted beam comprises two different polarizationorders; |R

poloarization state, and |L

with phase modification of −ilω, according to Eq. (2). The near-fieldintensity distributions of the transmitted beams followed by linearpolarizer were then measured. FIG. 13(a) shows the interferogrampatterns for various spiral PBOEs. The intensity dependence on theazimuthal angle is of the form I∝1+cos(lω), whereas the number of thefringes is equal to l, the topological charge of the beam. FIG. 13(b)illustrates the phase fronts resulting from the interferometer analysis,indicating spiral phases with different topological charges.

FIG. 15 shows the far-field images of the transmitted beams havingvarious topological charges, as well as the measured and theoreticallycalculated cross sections. We achieved the experimental result byfocusing the beam through a lens with a 500-mm focal length followed bya circular polarizer. We used the circular polarizer in order totransmit only the desired |L

state, and to eliminate the |R

polarization order that appeared because of the error in the etcheddepth of the grating to achieve the desired retardation of φ=π. Darkspots can be observed at the center of the far-field images, providingevidence the phase singularity in the center of the helical beams. Wefound an excellent agreement between theory and experiment, clearlyindicating the spiral phases of the beams with different topologicalcharges.

To conclude, we have demonstrated the formation of helical beams usingspace-variant Pancharatnam-Berry phase optical elements based oncomputer generated subwavelength dielectric grating. The formation ofthe spiral phase by PBOE is subject to the control of the localorientation of the grating. This can be performed with a high level ofaccuracy using an advanced photolithographic process. In contrast, theformation of SPE based on refractive optics, where the phase isinfluenced by fabrication errors due to inaccuracy of the etchedthree-dimensional profile. We are currently investigating aphotolithographic process to achieve accurate control of the retardationphase to yield only the desired polarization order.

4. Formation of Multilevel Pancharatnam-Berry Phase Diffractive OpticsUsing Space-variant Subwavelength Gratings:

Multilevel discrete Pancharatnam-Berry phase diffractive optics usingcomputer-generated space-variant subwavelength dielectric grating ispresented. The formation of a multilevel geometrical phase is done bydiscrete orientation of the local subwavelength grating. We discuss atheoretical analysis and experimentally demonstrate a quantizedgeometrical blazed phase of polarization diffraction grating, as well aspolarization dependent focusing lens for infra-red radiation atwavelength 10.6 μm.

One of the most successful and viable outgrowths of holography involvesdiffractive optical elements (DOE). DOEs diffract light from ageneralized grating structure having nonuniform groove spacing. They canbe formed as a thin optical element that provides unique functions andconfigurations. High diffraction efficiencies for DOEs can be obtainedwith kinoforms that are constructed as surface relief gratings on somesubstrate. However, in order to reach a high efficiency, it is necessaryto resort to complex fabrication processes that can provide the requiredaccuracies for controlling the graded shape and depth of the surfacegrooves. Specifically, in one process a single photomask with variableoptical density is exploited for controlling the etching rate of thesubstrate to fonm the desired graded relief gratings, or using multiplebinary photomasks so the graded shape is approximated by multilevelbinary steps. Both fabrication processes rely mainly on etchingtechniques that are difficult to accurately control. As a result, theshape and depth of the grooves can differ from those desired, whichleads to reduction of diffraction efficiency and poor repeatability ofperformance.

In the present invention we consider DOEs based on the space-domainPancharatnam-Berry phase. Unlike diffractive and refractive elements,the phase is not introduced through optical path differences, butresults from the geometric phase that accompanies space-variantpolarization manipulation. The elements are polarization dependent,thereby, enabling multipurpose optical elements that are suitable forapplications such as optical interconnects, beam splitting, and opticalswitching. Recently, we have demonstrated continuous Pancharatnam-berryphase optical elements (PBOEs) based on subwavelength grating. However,applying the constraint on the continuity of the grating leads to spacevarying of the local periodicity. Therefore, in order not to exceed theWood anomaly, the elements are limited in their dimensions as well asoptical parameters. Moreover, the results of space varying periodicitycomplicates the optimization of the photolithographic process. In orderto overcome these limitations, we show that such elements can berealized with a multilevel discrete binary geometrical phase, using acomputer-generated space-variant subwavelength dielectric grating. Bymultilevel discrete controlling of the local orientation of the grating,having uniform periodicity, we can achieve any desired phase element. Weexperimentally demonstrate Multilevel Pancharatnam-Berry phase OpticalElements (Multilevel-PBOE) as blazed diffraction grating and diffractivefocusing lens, for the 10.6-μm wavelength from a CO₂ laser, and showthat high diffraction efficiencies can be attained utilizing singlebinary computer-generated mask, as well as forming multipurposepolarization dependent optical elements.

The PBOEs are considered as waveplates with constant retardation andspace varying fast axes, the orientation of which is denoted by θ(x,y).It is convenient to form such space varying waveplate usingsubwavelength grating. When the period of a subwavelength periodicstructure is smaller than the incident wavelength, only zero order is apropagating order, and all other orders are evanescent. Thesubwavelength periodic structure behaves as a uniaxial crystal with theoptical axes parallel and perpedicular to the subwavelength grooves.Therefore, by fabricating quasi-periodic subwavelength structures, forwhich the period and orientation of the subwavelength grooves was spacevarying, we realized rotating waveplates. Furthermore, we showed thatsuch polarization manipulation inevitably led to phase modification ofgeometrical origin results from local polarization manipulation and wasin-fact a manifestation of the geometrical Pancharatnam-Berry phase.

It is convenient to describe PBOEs using Jones calculus. Thespace-dependent transmission matrix for PBOE is given by applying theoptical rotator matrix on the Jones matrix of the subwavelengthdielectric grating to yield in helical basis,${T( {r,\omega} )} = {{\frac{1}{2}( {t_{x} + {t_{y}{\mathbb{e}}^{{\mathbb{i}}\quad\phi}}} )\begin{pmatrix}1 & 0 \\0 & 1\end{pmatrix}} + {\frac{1}{2}( {t_{x} - {t_{y}{\mathbb{e}}^{{\mathbb{i}}\quad\phi}}} )\begin{pmatrix}0 & {\exp\lbrack {{\mathbb{i}}\quad 2{\theta( {x,y} )}} \rbrack} \\{\exp\lbrack {{- {\mathbb{i}}}\quad 2{\theta( {r,\omega} )}} \rbrack} & 0\end{pmatrix}}}$where t_(x), t_(y) are the real amplitude transmission coefficients forlight polarized perpendicular and parallel to the optical axes, and φ isthe retardation of the grating. Thus for an incident plane-wave witharbitrary polarization |E_(in)

, we find that the resulting field is, $\begin{matrix}{{ E_{out} \rangle = {{\sqrt{\eta_{E}} E_{i\quad n} \rangle} + {\sqrt{\eta_{R}}{\mathbb{e}}^{{\mathbb{i}}\quad 2{\theta{({x,y})}}} R \rangle} + {\sqrt{\eta_{L}}{\mathbb{e}}^{{\mathbb{i}2}\quad{\theta{({x,y})}}} L \rangle}}},{{{where}\quad\eta_{E}} = {{\frac{1}{2}( {t_{x} + {t_{y}{\mathbb{e}}^{{\mathbb{i}}\quad\phi}}} )}}^{2}},{\eta_{R} = { {\frac{1}{2}( {t_{x} + {t_{y}{\mathbb{e}}^{{\mathbb{i}}\quad\phi}}} )\langle E_{i\quad n} L} \rangle{^{2}{,{\eta_{L} =  {\frac{1}{2}( {t_{x} + {t_{y}{\mathbb{e}}^{{\mathbb{i}}\quad\phi}}} )\langle E_{i\quad n} R} \rangle}}}^{2}}},} & (2)\end{matrix}$are the polarization order coupling efficiencies,

α|β

denotes inner product, and |R

=(1 0)^(T) and |L

=(0 1)^(T) represent the right-hand and left-hand circular polarizationcomponents, respectively. From Eq. (2) it is evident that the emergingbeam from a PBOE comprises three polarization orders. The firstmaintains the original polarization state and phase of the incidentbeam, the second is right-hand circular polarized and has a phasemodification of 2θ(x,y), and the third is opposite to the second atpolarization hand and at phase modification. Note that the polarizationorder coupling efficiencies depend on the groove shape and material, aswell as on the polarization state of the incident beam. For thesubstantial case of t_(x)=t_(y)=1, and φ=π an incident wave with |R

polarization is subject to entire polarization state conversion andresults in emerging field,|E _(out) =e ^(−i2θ(x,y))|L

.   (3)An important feature of Eq. (3) is the phase factorφ_(d)(x,y)|_(mod2π)=−2θ(x,y)|_(mod2π) that depends on the localorientation of the subwavelength grating. This dependence is geometricalin nature and originates solely from local changes in the polarizationstate of the emerging beam.

In our approach, the continuous phase function φ_(d) (x,y) isapproximated with multilevel discrete binary steps leading to formationof PBOE with multilevel discrete binary local grating orientation. Inthe scalar approximation, an incident wave front is multiplied by thephase function of the multilevel phase element that is described by,exp[iF(φ_(d))], where φ_(d) is the desired phase and F(φ_(d)) is theactual quantized phase. The division of the desired phase φ_(d) to Nequal steps is shown in FIG. 16, where the actual quantized phaseF(φ_(d)) is given as a function of the desired phase. The Fourierexpansion of the actual phase front is given byexp[iF(φ_(d))]=Σ_(l)C_(l)exp(ilφ_(d)), where C_(l) is the lth-ordercoefficient of the Fourier expansion. The diffraction efficiency, η_(l),of the lth-diffracted order is given by η_(l)=|C_(l)|². Consequently,the diffraction efficiency η_(l) for the first diffracted order for suchan element is related to the number of discrete levels N byη_(l)=[(N/π)sin(π/N)]². This equation indicates that for 2,4,8, and 16phase quantization levels, the diffraction efficiency will be 40.5%,81.1%, 95.0%, and 98.7%, respectively. The creation of a multilevel-PBOEis done by multilevel discrete orientation of the local subwavelengthgrating as illustrated in FIG. 16.

Supposing we wish to design a blazed polarization diffraction grating,i.e. a grating for which all the diffracted energy is in the 1st order,when the incident beam is |R

polarized. We designed a multilevel-PBOE that acts as a diffractiongrating by requiring that φ_(d)=(2π/d)x|_(mod2π), forming the quantizedphase function F(φ_(d)) depicted in FIG. 16, where d is the period ofthe diffraction grating. In order to illustrate the effectiveness of ourapproach, we realized multilevel diffraction gratings with variousnumber of discrete levels, N=2,4,8,16,126. The grating was fabricatedfor CO₂ laser radiation with a wavelength of 10.6 μm, with diffractiongrating period d=2 mm and subwavelength grating period Λ=2 μm. Themagnified geometry of the gratings for number of discrete levels, N=4,is presented in FIG. 17, as well as their predicted geometricalquantized phase distribution. The elements were fabricated on 500 μmthick GaAs wafers using single binary mask, contact photolithography andelectron-cyclotron resonance etching with BCl₃ to nominal depth of 2.5μm, resulting in measured values of retardation φ=π/2, andt_(x)=t_(y)=0.9. By combining two such gratings we obtained a gratingwith φ=π. These values are close to the theoretical predictions achievedusing rigorous coupled wave analysis.

Following the fabrication, the multilevel-PBOEs were illuminated with aright-hand circularly polarized beam, |R

, at 10.6 μm wavelength. We used the circular polarized in order totransmit only the desired |L

state, and to eliminate the |R

polarization order, which appeared because of the error in the etcheddepth of the grating to achieve the desired retardation of φ=π. FIG. 17shows the measured and predicted diffraction efficiency for firstdiffracted order for the different multilevel-PBOEs. There is a goodagreement between the experimental results and the predictionefficiencies, providing verification of the expected multilevel discretebinary phase.

In addition, we formed a multilevel Pancharatnam-Berry focusing elementfor a 10.6 μm wavelength, which had a multilevel discrete sphericalphase function of F(φ_(d))=F[(2π/λ)(x²+y²+f²)^(1/2)], with 10 mmdiameter, focal length f=200 mm, and number of discrete levels N=8. FIG.18 illustrates the magnified geometry of a focusing lens based onmultilevel-PBOE with N=4, as well as the predicted multilevelgeometrical phase. A scanning electron microscope image of a region onthe subwavelength structure, which we had fabricated, is shown in theinset of FIG. 16. Diffraction limited focused spot size for |L

transmitted beam was measured, while illuminating the element with |R

polarization state, and inserting a circular polarizer. The inset inFIG. 18 shows the image of the focused spot size as well as the measuredand theoretically calculated cross section. The measured diffractionefficiency was 95% in agreement with the predicted value. Thegeometrical phase of the PBOE is polarization dependent, therefore, weexperimentally confirmed that our element is a converging lens forincident |R

state, and a diverging lens for incident |L

state, as indicated by Eq. (2). Moreover, it is possible to form bifocallens for PBOE with a retardation phase of φ=π while illuminating with alinear polarization beam, and inserting refractive lens following thePBOE. Trifocal lens can be created for PBOE with a retardation phase ofφ=π/2 resulting in distinct three different focuses for |R

, linear, and |L

polarization states.

To conclude, We have demonstrated the formation of multilevel discretePancharatnam-Berry phase optical elements using computer-generatedspace-variant subwavelength dielectric grating. We realized blazeddiffraction grating, as well as polarization dependent focusing lens.The introduction of space varying geometrical phases throughmultilevel-PBOEs, enables new approaches for novelpolarization-sensitive optical elements. We are currently investigatinga photolithographic process with the purpose of achieving accuratecontrol of the retardation phase to yield only the desired polarizationorder.

5. Near-field Fourier Transform Polarimetry By Use of a QuantizedSpace-variant Subwavelength Grating

Optical polarimetry measurement has been widely used for a large rangeof applications such as ellipsometry (J. Lee, J. Koh and R. W. Collins,“Multichannel Mueller matrix ellipsometer for real-time spectroscopy ofanisotropic surfaces and films”, Opt. Lett. 25, 1573-1575 (2000)),bio-imaging (V. Sankaran, M. J. Everett, D. J. Maitland and J. T. Walsh,Jr., “Comparison of polarized light propagation in biological tissue andphantoms”, Opt. Lett. 24, 1044-1046 (1999)), imaging polarimetry (G. P.Nordin, J. T. Meier, P. C. Deguzman and M. W. Jones, “Micropolarizerarray for infrared imaging polarimetry”, J. Opt. Soc. Am. A 16,1168-1174 (1999)) and optical communications (P. C. Chou, J. M. Fini andH. A. Haus, “Real-time principle state characterization for use in PMDcompensators”, IEEE Photon. Technol. Lett. 13, 568-570 (2001)). Acommonly used method is the measuring of the time-depended signal oncethe beam is transmitted through a photoelastic modulator (G. E.Jellison, Jr., “Four channel polarimeter for time-resolvedellipsometry”, Opt. Lett., 12, 766-768 (1987)) or a rotating quarterwave plate (QWP) followed by an analyzer (E. Collet, Polarized Light(Marcel Dekker, New York, 1993)). The polarization state of the beam canbe derived by Fourier analysis of the detected signal. This method,however, requires a sequence of consecutive measurements, thus making itimpractical for real-time polarization measurement in an applicationsuch as adaptive polarization-mode dispersion compensation in opticalcommunication. Moreover, it involves either mechanically orelectronically active elements resulting in a complicated and cumbersomedevice.

An increasing demand for faster and simpler methods has led to thedevelopment of the simultaneously four-channel ellipsometer (R. M. A.Azzam, “Integrated polarimeters based on anisotropic photodetectors”,Opt. Lett. 12, 555-557 (1987)). Using this method, the beam is splitinto four channels; each is analyzed using different polarization opticswhile the real-time polarization state is calculated from the measuredintensities. The main drawback of this method is its high sensitivity tostatistical errors due to the low number of measurements. Recently, Gori(F. Gori, “Measuring Stokes parameters by means of a polarizationgrating”, Opt. Lett. 24, 584-586 (1999)) proposed real-time polarimetryby use of a space-variant polarizer, in what is basically amanifestation of the four-channel technique. This method relies onmeasuring the far-field intensity and therefore is not suitable foron-chip integrated applications.

In a recent paper (Z. Bomzon, G. Biener, V. Keiner and E. Hasman,“Real-time analysis of partially polarized light with a space-variantsubwavelength dielectric grating”, Opt. Lett., 27, 188-190 (2002)) wepresented a space domain analogy to the rotating QWP method. Using thismethod, spatial intensity distribution analysis is applied forreal-time, near-field polarimetry. The intensity modulation is achievedby a space varying wave plate, realized as a computer-generated,space-variant, continuous subwavelength grating, followed by ananalyzer. However, continuity of the subwavelength grating had led to aspace dependent local period. Therefore, in order for the period not toexceed the Wood anomaly, the elements were restricted in their physicaldimensions. Moreover, the varying periodicity had complicated theoptimization of the photolithographic process and had led to spatialvariations in the retardation of the element.

In this paper we propose real-time near-field polarimetry by spatialdiscrete rotating of the groove orientation of a subwavelengthdielectric grating. The grating of this type of element is divided intoequal sized zones. The subwavelength grooves are of uniform orientationand period at each zone and are rotated at quantized angles, respectiveto each zone. The resulting elements are unlimitted in their dimensionsand have uniform optical parameters. We named such elements quantizedspace-variant subwavelength dielectric gratings (QSGs). Our method isless sensitive to statistical errors due to the increased number ofmeasurements, and is suitable for real-time applications and can be usedin compact configurations.

The concept of the near-field polarimetry based on subwavelengthgratings is presented in FIG. 19. A uniformly polarized light isincident upon a polarization sensitive medium (e.g. biological tissue,optical fiber, wave plate etc.) and then transmitted through a QSG,which acts as a space-variant wave plate, followed by a polarizer. Theresulting intensity distribution is imaged onto a camera and capturedfor further analysis. It is shown hereinafter that the emergingintensity distribution is uniquely related to the polarization state ofthe incoming beam. This dependence is given by a spatial Fourier seriesanalysis, whereby the resulting Fourier coefficients completelydetermine the polarization state of the incoming beam.

The QSGs are considered as wave plates with constant retardation andspace varying fast axes, the orientation of which is denoted by θ(x,y).It is convenient to form such space varying wave plates by use of asubwavelength grating. When the period of a subwavelength periodicstructure is smaller than the incident wavelength, only the zero orderis a propagating order, and all other orders are evanescent. Thesubwavelength periodic structure behaves as a uniaxial crystal with theoptical axes parallel and perpendicular to the subwavelength grooves.Therefore, by fabricating quasi-periodic subwavelength structures, forwhich the orientation of the subwavelength grooves is changed along thelength of the element, space-variant wave plates can be formed.

The creation of a QSG is done by discrete orientation of the localsubwavelength grating as illustrated in FIG. 20(a). The QSG is obtainedby dividing the element into N equal sized zones, along the x-axis,where each zone consists of a uniform orientation as well as a uniformsubwavelength grating period. The orientation of the grooves is definedby the angle, θ, between the grating vector K_(g) of the subwavelengthgrating (perpendicular to the grooves) and the x-axis, therefore θ is afunction of the x coordinate [θ(x)]. The grating period, d, is definedas the distance between the nearest zones having identical orientations.We consider the period of grating d as larger than the incidentwavelength λ, whereby the local subwavelength period of the grooves Λ,is smaller than the incident wavelength. FIG. 20(a) presents a QSG witha period that consists of N=4 zones of uniform orientation of thesubwavelength grating. We named N as the number of quantized levels.

The polarization state within Stokes representation is described by aStokes vector S=(S₀S₁, S₂, S₃)^(T), where S₀ is the intensity of thebeam, whereas S₁, S₂, S₃ represent the polarization state. In general,S₀ ²≧S₁ ²+S₂ ²+S₃ ², where the equality holds for fully polarized beams.The polarization state emerging from an optical system (i.e. waveplates, polarizers etc.) is linearly related to the incomingpolarization state through, S′=MS, where M is a 4-by-4 real Muellermatrix of the system and S, S′ are the Stokes vectors of the incomingand outgoing polarization states respectively.

The optical system under consideration consists of a QSG followed by apolarizer. This composite element can be described, in Cartesiancoordinates, by Mueller matrixM=PR(−θ)WR(θ),   (1)where ${R(\theta)} = \begin{pmatrix}1 & 0 & 0 & 0 \\0 & {\cos\quad 2\theta} & {\sin\quad 2\theta} & 0 \\0 & {{- \sin}\quad 2\theta} & {\cos\quad 2\theta} & 0 \\0 & 0 & 0 & 1\end{pmatrix}$is the Mueller matrix that representsrotation of the axis frame by angle θ, $W = {\frac{1}{2}\begin{pmatrix}{t_{x}^{2} + t_{y}^{2}} & {t_{x}^{2} - t_{y}^{2}} & 0 & 0 \\{t_{x}^{2} - t_{y}^{2}} & {t_{x}^{2} + t_{y}^{2}} & 0 & 0 \\0 & 0 & {2\quad t_{x}t_{y}\cos\quad\phi} & {{- 2}t_{x}t_{y}\sin\quad\phi} \\0 & 0 & {2t_{x}t_{y}\sin\quad\phi} & {2t_{x}t_{y}\cos\quad\phi}\end{pmatrix}}$is the Mueller matrix of a transversally uniform retarder, withretardation φ and real transmission coefficients for twoeigen-polarizations t_(x), t_(y). Finally,$P = {\frac{1}{2}\begin{pmatrix}1 & 1 & 0 & 0 \\1 & 1 & 0 & 0 \\0 & 0 & 0 & 0 \\0 & 0 & 0 & 0\end{pmatrix}}$is the Mueller matrixof an ideal horizontal polarizer.

The outgoing intensity can be related to the incoming polarization stateof the beam by calculating the Mueller matrix given by Eq. (1) and usingthe linear relation between the incoming and the outgoing stokesvectors, yielding,S ₀′(x)=¼{AS ₀+½(A+C)S ₁ +B(S ₁ +S ₀)cos2θ(x)+(BS ₂ −DS₃)sin2θ(x)++½(A−C)(S ₁cos4θ(x)+S ₂sin4θ(x))},  (2)where A=t_(x) ²+t_(y) ², B=t_(x) ²−t_(y) ², C=2t_(x)t_(y) cosφ,D=2t_(x)t_(y)sinφ.

Equation (2) describes the intensity of the outgoing beam as a truncatedFourier series with coefficients that depend on the Stokes parameters ofthe incident beam. In our case θ represents the quantized rotation angleof the retarder, (subwavelength grating), as a function of the locationalong the x-axis. A single period of θ can be written explicitly as,$\begin{matrix}{{{\theta(x)} = \begin{Bmatrix}0 & {0 < x < \frac{d}{N}} \\\frac{\pi}{N} & {\frac{d}{N} < x < \frac{2d}{N}} \\\vdots & \vdots \\\frac{\pi( {m - 1} )}{N} & {\frac{d( {m - 1} )}{N} < x < \frac{d\quad m}{N}} \\\vdots & \vdots \\\frac{\pi( {N - 1} )}{N} & {\frac{d( {N - 1} )}{N} < x < d}\end{Bmatrix}},} & (3)\end{matrix}$where m is an integer number, N≧m≧0. FIG. 2(b) illustrates θ(x) for anumber of quantized levels N=4. Note that θ(x) is periodic in π.

Inserting the quantized angle described by Eq. (3), into Eq. (2) andthen expanding the trigonometric expressions into a Fourier seriesyields the resulting intensity distribution, $\begin{matrix}{{S_{0}^{\prime}(x)} = {\frac{1}{4}{\{ {{AS}_{0} + {\frac{1}{2}( {A + C} )S_{1}} + {{B( {S_{1} + S_{0}} )}{\sum\limits_{n = 1}^{\infty}\lbrack {{a_{n}\cos\quad\frac{2\pi\quad{nx}}{d}} + {b_{n}\sin\quad\frac{2\pi\quad{nx}}{d}}} \rbrack}} + {( {{BS}_{2} - {DS}_{3}} ){\sum\limits_{n = 1}^{\infty}\lbrack {{c_{n}\sin\quad\frac{2\pi\quad{nx}}{d}} + {d_{n}\cos\quad\frac{2\pi\quad{nx}}{d}}} \rbrack}} + {\frac{1}{2}( {A - C} )( {{S_{1}{\sum\limits_{n = 1}^{\infty}\lbrack {{e_{n}\cos\quad\frac{4\pi\quad{nx}}{d}} + {f_{n}\sin\quad\frac{4\pi\quad{nx}}{d}}} \rbrack}} + {S_{2}{\sum\limits_{n = 1}^{\infty}\lbrack {{g_{n}\sin\frac{4\pi\quad{nx}}{d}} + {h_{n}\cos\quad\frac{4\pi\quad{nx}}{d}}} \rbrack}}} )}} \}.}}} & (4)\end{matrix}$The corresponding Fourier coefficients in Eq. (4) are given by,$\begin{matrix}{{a_{n} = {c_{n} = {\frac{N}{2\pi\quad n}{\sin( \frac{2\pi}{N} )}}}}{b_{n} = {d_{n} = {\frac{N}{\pi\quad n}{\sin^{2}( \frac{\pi}{N} )}}}}{e_{n} = {g_{n} = {\frac{N}{4\pi\quad n}{\sin( \frac{4\pi}{N} )}}}}{{f_{n} = {h_{n} = {\frac{N}{2\pi\quad n}{\sin^{2}( \frac{2\pi}{N} )}}}},}} & (5)\end{matrix}$for n=kN±1 (k=0,1,2,3, . . . ), and zero otherwise. One can see, fromEq. (5), that increasing the number of quantized levels, N, increasesa_(l), c_(l), e_(l), g_(l) towards unity and decreases b_(l), d_(l),f_(l), h_(l) towards zero. Moreover, as the number of quantized levelsincreases, the higher order terms tend to reach zero as well, thus atthe limit of an infinite number of quantized levels, Eq. (4) isdegenerated to the case of continuous space-variant subwavelengthgrating.

Using the Fourier analysis, the first coefficients of Eq. (4) yields,$\begin{matrix}{{{{AS}_{0} + {\frac{1}{2}( {A + C} )S_{1}}} = {\frac{2}{\pi}{\int_{0}^{2\pi}{{S_{0}^{\prime}(x)}{\mathbb{d}x}}}}},} & ( {6a} ) \\{{{{{B( {S_{1} + S_{0}} )}a_{1}} + {( {{BS}_{2} - {DS}_{3}} )d_{1}}} = {\frac{4}{\pi}{\int_{0}^{2\pi}{{S_{0}^{\prime}(x)}{\cos( \frac{2\pi\quad x}{d} )}{\mathbb{d}x}}}}},} & ( {6b} ) \\{{{{( {{BS}_{2} - {DS}_{3}} )c_{1}} + {{B( {S_{1} + S_{0}} )}b_{1}}} = {\frac{4}{\pi}{\int_{0}^{2\pi}{{S_{0}^{\prime}(x)}{\sin( \frac{2\pi\quad x}{d} )}{\mathbb{d}x}}}}},} & ( {6c} ) \\{{{\frac{1}{2}( {A - C} )( {{S_{1}e_{1}} + {S_{2}h_{1}}} )} = {\frac{4}{\pi}{\int_{0}^{2\pi}{{S_{0}^{\prime}(x)}{\cos( \frac{4\pi\quad x}{d} )}{\mathbb{d}x}}}}},} & ( {6d} ) \\{{\frac{1}{2}( {A - C} )( {{S_{2}g_{1}} + {S_{1}f_{1}}} )} = {\frac{4}{\pi}{\int_{0}^{2\pi}{{S_{0}^{\prime}(x)}{\sin( \frac{4\pi\quad x}{d} )}{{\mathbb{d}x}.}}}}} & ( {6e} )\end{matrix}$These equations are a linear combination of the Stokes parameters of theincident beam. In order to extract S₀-S₃, Eqs. (6a)-(6e) shouldrepresent 4 independent equations, which are obtained for N≧5. However,a larger number of quantized levels, N, is desirable, in which case alarger portion of the intensity is represented by the first harmonics ofevery series of Eq. (4) and, therefore, a larger signal to noise ratiocan be obtained.

Subwavelength quasi-periodic structures are conveniently described asdepicted in FIG. 20 using Jones calculus. The QSG, which is abirefringent element with optical axes, (parallel and perpendicular tothe grating grooves) that rotate periodically in the x-direction, can berepresented as a polarization diffraction grating. When a plane wavewith a uniform polarization is incident on such a periodic subwavelengthstructure, the transmitted field will be periodic in both thepolarization state and phase-front, therefore, we can expect this fieldto yield discrete diffraction orders. The interference between thediffraction orders in the near-field yields spatially intensitymodulation. Evidently, the resulting interferograrn pattern is directlyrelated to the incident polarization state.

In this representation, a uniform periodic subwavelength structure, thegrooves of which are oriented along the y-axis, can be described by theJones matrix, $\begin{matrix}{{J = \begin{pmatrix}t_{x} & 0 \\0 & {t_{y}{\mathbb{e}}^{\mathbb{i}\phi}}\end{pmatrix}},} & (7)\end{matrix}$where t_(x) and t_(y) are the real amplitude transmission coefficientsfor light polarized perpendicular and parallel to the optical axes and φis the retardation of the grating. Consequently, the space-dependenttransmission matrix of the QSG, can be described byT _(C)(x)=M(θ(x))JM ⁻¹ (θ(x)),   (8)where θ(x) is the quantized local orientation of the optical axis givenby Eq. (3) and FIG. 20(b), and ${M(\theta)} = \begin{pmatrix}{\cos\quad\theta} & {{- \sin}\quad\theta} \\{\sin\quad\theta} & {\cos\quad\theta}\end{pmatrix}$is the two-dimensional rotation matrix. Note that meanwhile, thepolarizer is omitted from the optical system, and this will be referredfurther on.

For convenience, we convert T_(C) (x) to the helicity basis, therefore,the space-variant polarization grating can be described by the matrix,T(x)=UT_(C)U⁻¹, where $U = {\frac{1}{\sqrt{2}}\begin{pmatrix}1 & 1 \\{- {\mathbb{i}}} & {\mathbb{i}}\end{pmatrix}}$is a unitary conversion matrix. Explicit calculation of T(x) yields,$\begin{matrix}{{T(x)} = {{\frac{1}{2}( {t_{x} + {t_{y}{\mathbb{e}}^{\mathbb{i}\phi}}} )\begin{pmatrix}1 & 0 \\0 & 1\end{pmatrix}} + {\frac{1}{2}( {t_{x} - {t_{y}{\mathbb{e}}^{\mathbb{i}\phi}}} ){\begin{pmatrix}0 & {\exp\lbrack {{\mathbb{i}2\theta}(x)} \rbrack} \\{\exp\lbrack {- {{\mathbb{i}2\theta}(x)}} \rbrack} & 0\end{pmatrix}.}}}} & (9)\end{matrix}$We further adopt the Dirac's bra-ket notations, in which |R

=(1,0)^(T) and |L

=(0, 1)^(T) are the two-dimensional unit vectors for right-hand andleft-hand circularly polarized light. Thus, the resulting field is aproduct of an incident plane wave with arbitrary polarization |E_(in)

and the space-dependent transmission matrix T(x) given by Eq. (9),yields $\begin{matrix}{{{ E_{out} \rangle = {{\eta_{E} E_{i\quad n} \rangle} + {\eta_{R}{\mathbb{e}}^{{\mathbb{i}2\theta}{({x,y})}} R \rangle} + {\eta_{L}{\mathbb{e}}^{- {{\mathbb{i}2\theta}{({x,y})}}} L \rangle}}},{where}}{{\eta_{E} = {\frac{1}{2}( {t_{x} - {t_{y}{\mathbb{e}}^{\mathbb{i}\phi}}} )}},{\eta_{R} = {\frac{1}{2}( {t_{x} - {t_{y}{\mathbb{e}}^{\mathbb{i}\phi}}} )\text{〈}E_{i\quad n} L \rangle}},{\eta_{L} = {\frac{1}{2}( {t_{x} - {t_{y}{\mathbb{e}}^{\mathbb{i}\phi}}} )\text{〈}E_{i\quad n} R \rangle}},}} & (10)\end{matrix}$the complex field coefficients and

α|β

denotes the inner product. From Eq. (10) it is evident that the emergingbeam from the QSG, which is denoted by |E_(out)

, comprises three polarization orders. The first maintains the originalpolarization state and phase of the incident beam, the second isright-hand circular polarized with a phase modification of 2θ(x), whilethe third has a polarization direction and phase modification oppositeto that of the former polarization order. Note that the phasemodification of the |R

and |L

polarization orders results solely from local changes in thepolarization state, therefore, is geometrical in nature.

Since θ(x) is a periodic function (Eq. (3), FIG. 2(b)), the functionse^(i2θ(x)) and e^(−i2θ(x)) in Eq. (10) can be expanded into the Fourierseries. Taking into account the connection between the Fourier series ofa conjugated functions e^(i2θ(x)) and e^(−i2θ(x)), leads to theequation, $\begin{matrix}{{ {{{ E_{out} \rangle = \eta_{E}}}E_{in}} \rangle + {\eta_{R}{\sum\limits_{m = {- \infty}}^{\infty}{\alpha_{m}{\mathbb{e}}^{{\mathbb{i}2\pi}\quad{{mx}/d}} R \rangle}}} + {\eta_{L}{\sum\limits_{m = {- \infty}}^{\infty}{\alpha_{- m}^{*}{\mathbb{e}}^{{\mathbb{i}2\pi}\quad{{mx}/d}} L \rangle}}}},} & (11)\end{matrix}$where α_(m)=1/_(2π)∫e^(i2θ(x))e^(i2πmx/d)dx. Based on Eq. (11) we findthat the diffraction efficiency into the m^(th) diffracted order of |R

polarization order, (η_(m) ^(R)=|α_(m)|²), is equal to the diffractionefficiency into the -m^(th) diffracted order of |L

(η_(−m) ^(L)=|α_(m) ^(·)|²), thus, |R

and |L

diffract adversely. Thereby, as depicted in FIG. 3, once a uniformlypolarized beam is incident upon the QSG, the resulting beam comprisesthree polarization states described by Eq. (10), whereas, thepolarization orders of |R

and |L

states are split into multiple diffraction orders due to thediscontinuity of the phase, 2θ(x).

In our near-field polarimetry concept, the wave-front emerging from thepolarization grating is incident upon a linear polarizer, described inthe helicity basis by Jones matrix of the form,$P = {\frac{1}{2}{\begin{pmatrix}1 & 1 \\1 & 1\end{pmatrix}.}}$The linear polarized field emerging from the polarizer is given by theproduct of Eq. (11) and P, yielding, $\begin{matrix}{{\overset{\sim}{E}}_{out} = {{\frac{1}{\sqrt{2}}\lbrack {{\eta_{E}( {\langle {E_{in}\text{|}R} \rangle + \langle {E_{in}\text{|}L} \rangle} )} + {\eta_{R}{\sum\limits_{m = {- \infty}}^{\infty}{a_{m}{\mathbb{e}}^{{\mathbb{i}2\pi}\quad{{mx}/d}}}}} + {\eta_{L}{\sum\limits_{m = {- \infty}}^{\infty}{a_{- m}^{*}{\mathbb{e}}^{{\mathbb{i}2\pi}\quad{{mx}/d}}}}}} \rbrack}.}} & (12)\end{matrix}$Consequently, the intensity distribution is given by |{tilde over(E)}_(out)|², which results after some algebraic manipulations, to theidentical expression as depicted in Eq. (4).

Note that by using a 4-f telescope configuration for imaging theemerging beam from our polarimeter, and inserting a spatial filter inthe Fourier plane, the higher diffracted order can be eliminated due tothe discontinuity of the phase, 2θ(x). Therefore, this can result in anintensity distribution resembling the pattern obtained by the continuousgrating based polarimeter.

The QSG element for CO₂ laser radiation of 10.6 μm wavelength wasfabricated upon 500 μm-thick GaAs wafer with Λ=2 μm, d=2.5 mm, and N=16.The dimensions of the element were 30 mm×3 mm and consisted of 12periods of d. Firstly, a binary chrome mask of the grating wasfabricated using high-resolution laser lithography. The pattern was thentransferred onto the GaAs wafer by use of photolithography, after whichwe etched the grating by electron cyclotron resonance with BCl₃ for 35min, resulting in an approximate 2.5 μm groove depth. Finally, anantireflection coating was applied to the backside of the wafer. FIG.20(c) shows a scanning electron microscopy image of a region upon thesubwavelength structure, which we had fabricated, whereas FIG. 2o(d)depicts an image of a cross section of the subwavelength grooves.

Following the measurements, we used the setup depicted in FIG. 19 totest our concept for polarization measurements, whereby, a subwavelengthmetal wire grating was used as a polarizer. First, a calibration processwas performed by illuminating the QSG followed by a polarizer with threedifferent polarized beams. We determined the experimental opticalparameters by fitting the curve of Eq. (4) to the measured intensitydistributions with t_(x), t_(y), and φ of the QSG as free parameters.The calibration process yielded a QSG having t_(x)=0.9, t_(y)=0.8, andretardation φ=0.3 π rad. These values are close to both the theoreticalpredictions that were achieved using a rigorous coupled wave analysis(P. Lalanne, and G. M. Morris, “Highly improved convergence of thecoupled-wave method for TM polarization”, J. Opt. Soc. Am. A 13, 779-784(1996)) for a groove profile depicted in FIG. 20(d), and to the directmeasurement of the optical parameters using ellipsometric techniques (E.Collet, Polarized Light (Marcel Dekker, New York, 1993)).

In order to test the ability of our device in conducting polarizationmeasurements of fully polarized light, we used a CO₂ laser that emittedlinearly polarized light at a wavelength of 10.6 μm and replaced thepolarization-sensitive medium with a QWP. The images were captured by aSpiricon Pyrocam III, at a rate of 24 Hz. FIG. 22 shows the measuredintensity distributions captured in a single camera frame, when the fastaxis of the QWP was set at angles 0°, 20°, and 45°, as well as thepredicted results calculated by Eq. (4) for A=1.45, B=0.17, C=0.8464,and D=1.165. Consequently, FIG. 23 shows the measured and predictedStokes parameters of a resulting beam as a function of the orientationof the QWP. We determined the experimental values of S₁, S₂, and S₃ byusing Eq. (6). There is a good agreement between the predictions andexperimental results. Moreover, FIG. 6 shows the experimental andtheoretical azimuthal angle, ψ, and ellipticity χ, calculated from thedata in FIG. 5, by use of the relations tan(2ψ)=S₂/S₁ and sin(2χ)=S₃/S₀[6]. The measurements yield a standard deviation error with respect tothe theoretical prediction of 2.6° and 0.6° for the azimuthal angle andthe ellipticity angle, respectively. The errors of the polarizationmeasurements result mainly from systematic errors such as the nature ofthe algorithm, unprecision in the rotation of the QWP, opticalperformance of the QWP, low resolution of the IR camera and dynamicrange, as well as statistical noise due to spatial and temporalfluctuation of the light emitted from the laser, shot noise andamplifier noise of the IR camera, pixel response nonuniformity, andquantization noise. The standard deviations in the azimuthal angle andellipticity for a series of successive measurements were 0.2° and 0.07°,respectively.

In order to demonstrate the use of a QSG for polarimetry of partiallypolarized beams, two independent CO₂ lasers of orthogonal linearpolarization states were combined by use of the setup depicted in theinset at the top of FIG. 25. The degree of polarization (DOP) is definedby DOP=√{square root over (S₁ ²+S₂ ²+S₃ ²)}/S₀. For incoherent beamsummation, the Stokes vector of the resulting beam is the sum of theStokes of the combined beams. In the case of two orthogonal linearpolarized beams, the DOP is given by DOP=(I₁-I₂)/(I₁+I₂), were I₁ and I₂are the intensities of the horizontally and vertically polarized beams,respectively. FIG. 25 shows the measured and predicted DOP as a functionof the intensity ratio I₁/I₂. The inset shows the experimental intensitydistributions for two extreme cases. The first is for equal intensities(I₁=I₂), in which the measured DOP is of 0.0059, indicating unpolarizedlight. The second is for illuminating a single laser only (i.e. I₂=0),in which the measured DOP results in 0.975, indicating fully polarizedlight. This experiment shows the ability to obtain all four Stokesparameters simultaneously, thereby, emphasizing the good agreementbetween prediction and measurement for partially polarized light.

We have theoretically analyzed and experimentally demonstrated the useof a computer-generated space-variant quantized subwavelength dielectricgrating for real-time polarization measurement. The quantizedsubwavelength gratings are unlimited in their dimensions, have uniformoptical properties (t_(x), t_(y) and φ), and in general, arelightweight, compact and highly efficient. Both the space-variantsubwavelength dielectric grating and the polarizer were realized usingphotolithographic techniques commonly used in the production ofmicro-electric devices. Therefore, the camera and the gratings could becombined into a single chip, resulting in a very small device forpolarization measurements.

It should be clear that the description of the embodiments and attachedFigures set forth in this specification serves only for a betterunderstanding of the invention, without limiting its scope as covered bythe following Claims or their equivalents.

It should also be clear that a person skilled in the art, after readingthe present specification could make adjustments or amendments to theattached Figures and above described embodiments that would still becovered by the following Claims or their equivalents.

1. A space variant polarization optical element for spatiallymanipulating polarization-dependent geometrical phases of an incidentlight beam, the element comprising a substrate comprising a plurality ofzones of gratings with a continuously varying orientation, theorientation denoted by θ(x,y) which is equal to half of a desiredgeometrical phase (DGP) modulus 2π, each grating with a local periodthat is smaller than the wavelength of the incident light beam.
 2. Theoptical element of claim 1, wherein the orientation of the gratingsatisfies the equation 2θ(x,y)=πr²/λf|_(mod2π), where f is a desiredfocal length and λ is the wavelength of the incident light beam, wherebythe optical element is used as a converging lens if the incident lightbeam exhibits right-hand circular polarization, and as a diverging lensif the incident light beam exhibits left-hand circular polarization. 3.The optical element of claim 1, wherein the following relation ismaintained ∇×K_(g)=0, where K_(g)=K₀ (x,y)[cos(φ_(d)(x,y)/2){circumflexover (x)}+sin(φ_(d)(x,y)/2)ŷ], where K_(g) is a grating vector,{circumflex over (x)} and ŷ are unit vectors in the x and y direction,K₀=2π/Λ(x,y), where K₀ is the spatial frequency of the grating, Λ is thelocal period of the grating and φ_(d)(x,y)/2 is the space-variantdirection of the vector so that it is perpendicular to the gratingstripes at any given point.
 4. The optical element of claim 1, used asdiffraction grating element, wherein the following equation ismaintained φ_(d)=(2π/d)x|_(mod2π), where d is the period of theplurality of zones, and wherein the grating satisfies the relationφ_(g)(x,y)=(2d/Λ₀)sin(πx/d)exp(−πy/d), where Λ₀ is the local period ofthe grating at y=0.
 5. The optical element of claim 1, wherein thesubstrate is a wafer.
 6. The optical element of claim 5, wherein thewafer is manufactured using photolithography techniques.
 7. The opticalelement of claim 6, wherein the wafer is manufactured using etching. 8.The optical element of claim 1, wherein the grating is in blazed form,with opposite blazed directions for incident left-hand circularpolarization and for right-hand circular polarization, of the incidentlight beam.
 9. The optical element of claim 1, wherein the orientationof the gratings varies linearly in a predetermined direction.
 10. Theoptical element of claim 1, wherein the orientation of the grating ofthe zones satisfies the equation θ(x)=−πx/d|_(modπ), where θ(x) is theorientation of a grating line at a position x on an axis, and d is theperiod of the orientation of the grating of the zones.
 11. The opticalelement of claim 1, wherein it is used as an optical switch.
 12. Theoptical element of claim 1, wherein it is used as a beam-splitter. 13.The optical element of claim 1, used as a Lee-type binary subwavelengthstructure mask.
 14. The optical element of claim 1, wherein it is usedfor polarimetry.
 15. The optical element of claim 1, wherein the gratingin each zone comprise of at least two regions of gratings arranged indifferent orientations.
 16. The optical element of claim 1, wherein thefollowing relation is satisfied, θ(x,y)=ω(x,y)+c, where x and y arecoordinates of a specific position in an orthogonal set of axes,ω=arctan(y/x) is the azimuthal angle, and c is a constant.
 17. Theoptical element of claim 1, wherein the orientation of the grating isspiral.
 18. The optical element of claim 1, wherein the orientation ofthe grating satisfies the relation θ(r,ω)=lω/2, where l is a topologicalcharge, and r,ω indicate a specific angular position at radius r andangle ω.
 19. The optical element of claim 18 , wherein the gratingsatisfy the relation φ_(g)(r,ω)=(2πr₀/Λ₀)(r₀/r)^(l/2−1)cos[(l/2−1)ω]/[l/2−1] for l≠2, and φ_(g)(r,ω)=(2πr₀/Λ₀)ln(r/r₀) for l=2,where Λ₀ is the local period of the grating .
 20. A space variantpolarization optical element for spatially manipulatingpolarization-dependent geometrical phases of an incident light beam, theelement comprising a substrate comprising a plurality of zones ofgratings with discretely varying orientation, the orientation denoted byθ(x,y) which is equal to half of a desired geometrical phase (DGP)modulus 2π, each grating with a local period that is substantiallysmaller than the wavelength of the incident light beam.
 21. The opticalelement of claim 20, wherein the discretely varying orientationcomprises rotated orientation.
 22. The optical element of claim 21,wherein the rotated orientation varies linearly.
 23. The optical elementof claim 20, used as diffraction grating element, wherein the followingequation is maintained φ_(d)=(2π/d)x|_(mod2π), where d is the period ofthe plurality of zones, and wherein the grating satisfies the relationφ_(g)(x,y)=(2d /Λ₀)sin(πx/d)exp(−πy/d), where Λ₀ is the local period ofthe grating at y=0.
 24. The optical element of claim 20, wherein thesubstrate is a wafer.
 25. The optical element of claim 20, wherein thewafer is manufactured using photolithography techniques.
 26. The opticalelement of claim 25, wherein the wafer is manufactured using etching.27. The optical element of claim 20, wherein the orientation of thegrating of the zones satisfies the equation θ(x)=−πx/d|_(modπ), whereθ(x) is the orientation of a grating line at a position x on an axis,and d is the period of the orientation of the grating of the zones. 28.The optical element of claim 20, wherein it is used as an opticalswitch.
 29. The optical element of claim 20, wherein it is used as abeam-splitter.
 30. The optical element of claim 20, used as a Lee-typebinary subwavelength structure mask.
 31. The optical element of claim20, wherein it is used for polarimetry.
 32. The optical element of claim20, wherein the grating in each zone comprise of at least two regions ofgratings arranged in different orientations.
 33. The optical element ofclaim 20, wherein the following relation is satisfied, θ(x,y)=ω(x,y)+c,where x and y are coordinates of a specific position in an orthogonalset of axes, ω=arctan(y/x) is the azimuthal angle, and c is a constant.34. The optical element of claim 20, wherein the orientation of thegrating satisfies the relation θ(r,ω)=lω/2, where l is a topologicalcharge, and r,ω indicate a specific angular position at radius r andangle ω.
 35. The optical element of claim 34, wherein the gratingsatisfy the relation φ_(g)(r,ω)=(2πr₀/Λ₀)(r₀/r)^(l/2−1)cos[(l/2−1)ω]/[l/2−1] for l≠2, and φ_(g)(r,ω)=(2πr₀/Λ₀)ln(r/r₀) for l=2,where Λ₀ is the local period of the grating.
 36. The optical element ofclaim 20, wherein the zones of gratings are arranged in an annularmanner.
 37. The optical element of claim 20, wherein the zones ofgratings are arranged in a coaxial manner.
 38. A method for spatiallymanipulating polarization-dependent geometrical phases of an incidentlight beam, the method comprising: providing a substrate comprising aplurality of zones of gratings, with a continuously varying orientation,the orientation denoted by θ(x,y) which is equal to half of a desiredgeometrical phase (DGP) modulus 2π, each grating having a local periodthat is smaller than the wavelength of the incident light beamirradiating the incident light beam onto the substrate.
 39. The methodof claim 38, wherein the orientation of the grating satisfies theequation 2θ(x,y)=πr²/λf|_(mod2π), where f is a desired focal length andλ is the wavelength of the incident light beam, whereby the opticalelement is used as a converging lens if the incident light beam exhibitsright-hand circular polarization, and as a diverging lens if theincident light beam exhibits left-hand circular polarization.
 40. Themethod of claim 38, wherein the following relation is maintained∇×K_(g)=0, where K_(g)=K₀ (x,y)[cos(φ_(d)(x,y)/2){circumflex over(x)}+sin(φ_(d)(x,y)/2)ŷ], where K_(g) is a grating vector, {circumflexover (x)} and ŷ are unit vectors in the x and y direction, K₀=2π/Λ(x,y),where K₀ is the spatial frequency of the grating, Λ is the local periodof the grating and φ_(d) (x,y)/2 is the space-variant direction of thevector so that it is perpendicular to the grating stripes at any givenpoint.
 41. The method of claim 38, used as diffraction grating element,wherein the following equation is maintained φ_(d)=(2π/d)x|_(mod2π),where d is the period of the plurality of zones, and wherein the gratingsatisfies the relation φ_(g) (x,y)=(2d/Λ₀)sin(πx/d)exp(−πy/d), where Λ₀is the local period of the grating at y=0.
 42. The method of claim 38,wherein the grating is in blazed form, with opposite blazed directionsfor incident left-hand circular polarization and for right-hand circularpolarization, of the incident light beam.
 43. The method of claim 38,wherein the orientation of the gratings varies linearly in apredetermined direction.
 44. The method of claim 38, wherein theorientation of the grating of the zones satisfies the equationθ(x)=−πx/d|_(modπ), where θ(x) is the orientation of a grating line at aposition x on an axis, and d is the period of the orientation of thegrating of the zones.
 45. The method of claim 38, wherein it is used foroptical switching.
 46. The method of claim 38, wherein it is used forbeam-splitting.
 47. The method of claim 38, wherein it is used forpolarimetry.
 48. The method of claim 38, wherein the grating in eachzone comprise of at least two regions of gratings arranged in differentorientations.
 49. The method of claim 38, wherein the following relationis satisfied, θ(x,y)=ω(x,y)+c, where x and y are coordinates of aspecific position in an orthogonal set of axes, ω=arctan(y/x) is theazimuthal angle, and c is a constant.
 50. The method of claim 38,wherein the orientation of the grating is spiral.
 51. The method ofclaim 38, wherein the orientation of the grating satisfies the relationθ(r, ω)=lω/2, where l is a topological charge, and r,ω indicate aspecific angular position at radius r and angle ω.
 52. The method ofclaim 51, wherein the grating satisfy the relationφ_(g)(r,ω)=(2πr₀/Λ₀)(r₀/r)^(l/2−1) cos[(l/2−1)ω]/[l/2−1] for l≠2, andφ_(g)(r,ω)=(2πr₀/Λ₀)ln(r/r₀) for l=2, where Λ₀ is the local period ofthe grating.
 53. A method for spatially manipulatingpolarization-dependent geometrical phases of an incident light beam, themethod comprising: providing a substrate comprising a plurality of zonesof gratings with discretely varying orientation, the orientation denotedby θ(x,y) that is equal to half of a desired geometrical phase (DGP)modulus 2π, each grating with a local period that is substantiallysmaller than the wavelength of the incident light beam; irradiating thelight beam on the substrate.
 54. The method of claim 53, wherein thediscretely varying orientation comprises rotated orientation.
 55. Themethod of claim 54, wherein the rotated orientation varies linearly. 56.The method of claim 54, used as diffraction grating element, wherein thefollowing equation is maintained φ_(d)=(2π/d)x|_(mod2π), where d is theperiod of the plurality of zones, and wherein the grating satisfies therelation φ_(g) (x,y)=(2d /Λ₀)sin(πx/d)exp(−y/d), where Λ₀ is thesubwavelength period at y=0.
 57. The method of claim 54, wherein theorientation of the grating of the zones satisfies the equationθ(x)=−πx/d|_(modπ), where θ(x) is the orientation of a grating line at aposition x on an axis, and d is the period of the orientation of thegrating of the zones.
 58. The method of claim 53, wherein it is used foroptical switching.
 59. The method of claim 53, wherein it is used forbeam-splitting.
 60. The method of claim 53, wherein it is used forpolarimetry.
 61. The method of claim 53, wherein the grating in eachzone comprise of at least two regions of gratings arranged in differentorientations.
 62. The method of claim 53, wherein the following relationis satisfied, θ(x,y)=ω(x,y)+c, where x and y are coordinates of aspecific position in an orthogonal set of axes, ω=arctant(y/x) is theazimuthal angle, and c is a constant.
 63. The method of claim 53,wherein the orientation of the grating satisfies the relationθ(r,ω)=lω/2, where l is a topological charge, and r,ω indicate aspecific angular position at radius r and angle ω.
 64. The method ofclaim 63, wherein the grating satisfy the relationφ_(g)(r,ω)=(2πr₀/Λ₀)(r₀/r)^(l/2−1) cos[(l/2−1)ω]/[l/2−1] for l≠2, andφ_(g)(r,ω)=(2πr₀/Λ₀)ln(r/r₀) for l=2, where Λ₀ is the local period ofthegrating.
 65. The method of claim 53, wherein the zones of gratings arearranged in an annular manner.
 66. The method of claim 53, wherein thezones of gratings are arranged in a coaxial manner. 67-68. (canceled)